Microtechnology and MEMS – serie

Capillary Forces in Microassembly

Modeling, Simulation, Experiments, and Case Study

Capillary Forces in Microassembly

Modeling, Simulation, Experiments, and Case Study

Advanced Analytical Methods in Tribology

Piezotronics and Piezo-Phototronics

Applications to Third-Generation Semiconductors

Piezotronics and Piezo-Phototronics

Applications to Third-Generation Semiconductors

Piezo-Electric Electro-Acoustic Transducers

Piezo-Electric Electro-Acoustic Transducers

Advanced Analytical Methods in Tribology

Modelling of Microfabrication Systems

Micromachines as Tools for Nanotechnology

Shape Memory Microactuators

Force Sensors for Microelectronic Packaging Applications

CCD Image Sensors in Deep-Ultraviolet

Degradation Behavior and Damage Mechanisms

Integrated Chemical Microsensor Systems in CMOS Technology

Micromechanical Photonics

Piezoelectric Multilayer Beam Bending Actuators

Static and Dynamic Behavior and Aspects of Sensor Integration

Fast Simulation of Electro-Thermal MEMS

Efficient Dynamic Compact Models

Silicon Microchannel Heat Sinks

Theories and Phenomena

Laser Diode Microsystems

CMOS Cantilever Sensor Systems

Atomic Force Microscopy and Gas Sensing Applications

Mechanical Microsensors

CMOS Hotplate Chemical Microsensors

Thermal Transport for Applications in Micro/Nanomachining

Modelling of Microfabrication Systems

Shape Memory Microactuators

Force Sensors for Microelectronic Packaging Applications

CCD Image Sensors in Deep-Ultraviolet

Degradation Behavior and Damage Mechanisms

Integrated Chemical Microsensor Systems in CMOS Technology

Micromechanical Photonics