Modelling of Microfabrication Systems

Inbunden, Engelska, 2003

Av Raja Nassar, Weizhong Dai, W. Dai

2 099 kr

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

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