Modelling of Microfabrication Systems

Inbunden, Engelska, 2003

Av Raja Nassar, Weizhong Dai, W. Dai

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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.

Produktinformation

Utgivningsdatum2003-06-13
Mått155 x 235 x 20 mm
Vikt588 g
FormatInbunden
SpråkEngelska
SerieMicrotechnology and MEMS
Antal sidor270
Upplaga2003
FörlagSpringer-Verlag Berlin and Heidelberg GmbH & Co. KG
ISBN9783540002529

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From the reviews:"This book is aimed at people working on simulation and optimization process fabrication of Microelectromechanical Systems (MEMS). … the book provides a fairly complete view of the modeling of microfabrication processes. … ‘It will be invaluable to scientists, engineers, graduate students, and manufacturers engaged in research and development for enhancing the accuracy and precision of microfabrication systems for commercial applications’." (Grégory Guisbiers, Physicalia, Vol. 26 (1), 2004)