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This is the first book to address modelling of systems that are important to the fabrication of three-dimensional microstructures. It is unique in that it focuses on high aspect ratio microtechnology, ranging from ion beam micromachining to x-ray lithography.
- Format: Previously published in hardcover
- ISBN: 9783642055362
- Språk: Engelska
- Antal sidor: 270
- Utgivningsdatum: 2010-12-08
- Förlag: Springer-Verlag Berlin and Heidelberg GmbH & Co. KG