Del 83 - European Materials Research Society Symposia Proceedings

Materials Aspects in Microsystem Technologies

Inbunden, Engelska, 1999

Av D. Barbier, J.R. Morante, P. Temple-Boyer, G. Mueller, W. Lang, France) Barbier, D. (Laboratoire de Physique de la Matiere, INSA, Villeurbanne, Spain) Morante, J.R. (Universitat de Barcelona, France) Temple-Boyer, P. (LAAS, Toulouse, Germany) Mueller, G. (Daimler-Benz AG, Munchen, Germany) Lang, W. (Fraunhofer Institute for Solid State Technology - FhG IFT, Munchen, J. R. Morante

2 349 kr

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Produktinformation

Utgivningsdatum1999-08-13
Mått210 x 279 x 0 mm
Vikt740 g
FormatInbunden
SpråkEngelska
SerieEuropean Materials Research Society Symposia Proceedings
Antal sidor267
FörlagElsevier Science
ISBN9780080436111

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Chapter headings and selected papers: Materials Deposition and Microstructuring. Roughning and smoothing dynamics during KOH silicon etching (R. Divan et al.). Silicon elastomer as a protective layer in 3D microfabrication of micro-opto-electro-mechanical systems (P. Obreja et al.). Growth of piezoelectric thin films with fine grain microstructure by high energy pulsed laser deposition (F. Craciun et al.). Obtention and characterization of bioengineered layers onto silica-based microstructures (S. Falipou et al.). Microstructure of Cu-C interface in Cu-based metal matrix composite (A. Berner et al.). Porous Silicon in Microsystems. Porous silicon technique for realization of surface micromachined silicon structures with large gaps (H. Artmann, W. Frey). Characterization. Characterization of the nonlinear optical properties of crystals by the SHEW technique (R. Kremer et al.). Bonding and Packaging. Devices. Microstructures of the monomorph piezoelectric ceramic actuators with functional gradients (X. Zhu et al.). Electrostatically actuated micromirror devices in silicon technology (W. Lang et al.). A thermoelectric converter for energy supply (H. Glosch et al.). Author index. Subject index.

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