• I Introduction.- 1 Solid Surfaces, Their Structure and Composition.- 2 UHV Basics.- II Techniques.- 3 Electron Microscope Techniques for Surface Characterization.- 4 Sputter Depth Profiling.- 5 SIMS — Secondary Ion Mass Spectrometry.- 6 Auger Electron Spectroscopy and Microscopy — Techniques and Applications.- 7 X-Ray Photoelectron Spectroscopy.- 8 Vibrational Spectroscopy of Surfaces.- 9 Rutherford Backscattering Spectrometry and Nuclear Reaction Analysis.- 10 Materials Characterization by Scanned Probe Analysis.- 11 Low Energy Ion Scattering.- 12 Reflection High Energy Electron Diffraction.- 13 Low Energy Electron Diffraction.- 14 Ultraviolet Photoelectron Spectroscopy of Solids.- 15 EXAFS.- III Processes and Applications.- 16 Minerals, Ceramics and Glasses.- 17 Characterization of Catalysts by Surface Analysis.- 18 Application to Semiconductor Devices.- 19 Characterisation of Oxidised Surfaces.- 20 Coated Steel.- 21 Thin Film Analysis.- 22 Identification of Adsorbed Species.- 23 Surface Analysis of Polymers.- 24 Glow Discharge Optical Emission Spectrometry.- IV Appendix.- Acronyms Used in Surface and Thin Film Analysis.- Surface Science Bibliography.

I teach graduate courses on Surface Analysis and on Surface Science (with a strong component of Surface Analysis). I was so impressed with the first edition of this book that I intended to adopt it for my class but, unfortunately, it was soon out-of-print. I encouraged John O'Connor to prepare another edition of this jewel that I could use in the future. What distinguishes this book from others is the very unusual breadth. It covers fundamentals, practical issues of analyses, and concrete applications to the analysis of metals, semiconductors, polymers, and ceramics (including minerals). Quote from Prof. Raul Baragiola, University of Virginia From the reviews of the second edition: "More than 30 experts have contributed to this book providing a wealth of expertise based on theoretical as well as practical background. ... the book can be recommended not only to university students but also to scientists and engineers working in industry. It will help to find the appropriate method, or better the combination of methods, which will be needed to solve problems in process control and failure analysis." (W. Oesterle, Werkstoffe und Korrosion/Materials and Corrosion, Vol. 55 (3), 2004)

• I Introduction.- 1 Solid Surfaces, Their Structure and Composition.- 2 UHV Basics.- II Techniques.- 3 Electron Microscope Techniques for Surface Characterization.- 4 Sputter Depth Profiling.- 5 SIMS — Secondary Ion Mass Spectrometry.- 6 Auger Electron Spectroscopy and Microscopy — Techniques and Applications.- 7 X-Ray Photoelectron Spectroscopy.- 8 Vibrational Spectroscopy of Surfaces.- 9 Rutherford Backscattering Spectrometry and Nuclear Reaction Analysis.- 10 Materials Characterization by Scanned Probe Analysis.- 11 Low Energy Ion Scattering.- 12 Reflection High Energy Electron Diffraction.- 13 Low Energy Electron Diffraction.- 14 Ultraviolet Photoelectron Spectroscopy of Solids.- 15 EXAFS.- III Processes and Applications.- 16 Minerals, Ceramics and Glasses.- 17 Characterization of Catalysts by Surface Analysis.- 18 Application to Semiconductor Devices.- 19 Characterisation of Oxidised Surfaces.- 20 Coated Steel.- 21 Thin Film Analysis.- 22 Identification of Adsorbed Species.- 23 Surface Analysis of Polymers.- 24 Glow Discharge Optical Emission Spectrometry.- IV Appendix.- Acronyms Used in Surface and Thin Film Analysis.- Surface Science Bibliography.

I teach graduate courses on Surface Analysis and on Surface Science (with a strong component of Surface Analysis). I was so impressed with the first edition of this book that I intended to adopt it for my class but, unfortunately, it was soon out-of-print. I encouraged John O'Connor to prepare another edition of this jewel that I could use in the future. What distinguishes this book from others is the very unusual breadth. It covers fundamentals, practical issues of analyses, and concrete applications to the analysis of metals, semiconductors, polymers, and ceramics (including minerals). Quote from Prof. Raul Baragiola, University of Virginia From the reviews of the second edition: "More than 30 experts have contributed to this book providing a wealth of expertise based on theoretical as well as practical background. ... the book can be recommended not only to university students but also to scientists and engineers working in industry. It will help to find the appropriate method, or better the combination of methods, which will be needed to solve problems in process control and failure analysis." (W. Oesterle, Werkstoffe und Korrosion/Materials and Corrosion, Vol. 55 (3), 2004)

• I Introduction.- 1 Solid Surfaces, Their Structure and Composition.- 2 UHV Basics.- II Techniques.- 3 Electron Microscope Techniques for Surface Characterization.- 4 Sputter Depth Profiling.- 5 SIMS — Secondary Ion Mass Spectrometry.- 6 Auger Electron Spectroscopy and Microscopy — Techniques and Applications.- 7 X-Ray Photoelectron Spectroscopy.- 8 Vibrational Spectroscopy of Surfaces.- 9 Rutherford Backscattering Spectrometry and Nuclear Reaction Analysis.- 10 Materials Characterization by Scanned Probe Analysis.- 11 Low Energy Ion Scattering.- 12 Reflection High Energy Electron Diffraction.- 13 Low Energy Electron Diffraction.- 14 Ultraviolet Photoelectron Spectroscopy of Solids.- 15 EXAFS.- III Processes and Applications.- 16 Minerals, Ceramics and Glasses.- 17 Characterization of Catalysts by Surface Analysis.- 18 Application to Semiconductor Devices.- 19 Characterisation of Oxidised Surfaces.- 20 Coated Steel.- 21 Thin Film Analysis.- 22 Identification of Adsorbed Species.- 23 Surface Analysis of Polymers.- 24 Glow Discharge Optical Emission Spectrometry.- IV Appendix.- Acronyms Used in Surface and Thin Film Analysis.- Surface Science Bibliography.

I teach graduate courses on Surface Analysis and on Surface Science (with a strong component of Surface Analysis). I was so impressed with the first edition of this book that I intended to adopt it for my class but, unfortunately, it was soon out-of-print. I encouraged John O'Connor to prepare another edition of this jewel that I could use in the future. What distinguishes this book from others is the very unusual breadth. It covers fundamentals, practical issues of analyses, and concrete applications to the analysis of metals, semiconductors, polymers, and ceramics (including minerals). Quote from Prof. Raul Baragiola, University of Virginia From the reviews of the second edition: "More than 30 experts have contributed to this book providing a wealth of expertise based on theoretical as well as practical background. ... the book can be recommended not only to university students but also to scientists and engineers working in industry. It will help to find the appropriate method, or better the combination of methods, which will be needed to solve problems in process control and failure analysis." (W. Oesterle, Werkstoffe und Korrosion/Materials and Corrosion, Vol. 55 (3), 2004)