This text is written by a team of authors associated with SEM and X-ray Microanalysis Courses presented as part of the Lehigh University Microscopy Summer School. Several of the authors have participated in this activity for more than 30 years.

• Preface.- Scanning Electron Microscopy and Associated Techniques: Overview.- Electron Beam – Specimen Interactions: Interaction Volume.- Backscattered Electrons.- Secondary Electrons.- X-rays.- SEM Instrumentation.- Image Formation.- SEM Image Interpretation.- The Visibility of Features in SEM Images.- Image Defects.- High resolution imaging.- Low Beam Energy SEM.- Variable Pressure Scanning Electron Microscopy (VPSEM).- ImageJ and Fiji.- SEM Imaging checklist.- SEM Case Studies.- Energy Dispersive X-ray Spectrometry: Physical Principles and User-Selected Parameters.- DTSA-II EDS Software.- Qualitative Elemental Analysis by Energy Dispersive X-ray Spectrometry.- Quantitative Analysis: from k-ratio to Composition.- Quantitative analysis: the SEM/EDS elemental microanalysis k-ratio procedure for bulk specimens, step-by-step.- Trace Analysis by SEM/EDS.- Low Beam Energy X-ray Microanalysis.- Analysis of Specimens with Special Geometry: Irregular Bulk Objects and Particles.- CompositionalMapping.- Attempting Electron-Excited X-ray Microanalysis in the Variable Pressure Scanning Electron Microscope (VP-SEM).- Energy Dispersive X-ray Microanalysis Checklist.- X-ray Microanalysis Case Studies.- Cathodoluminescence.- Characterizing crystalline materials in the SEM.- Focused Ion Beam Applications in the SEM laboratory.- Ion Beam Microscopy.- Appendix – A Database of Electron-Solid Interactions.- Index.

Form the reviews of the third edition:“There is no other single volume that covers as much theory and practice of SEM or X-ray microanalysis as Scanning Electron Microscopy and X-ray Microanalysis, 3rd Edition does. It is clearly written ... well organized. ... This is a reference text that no SEM or EPMA laboratory should be without.” (Thomas J. Wilson, Scanning, Vol. 27 (4), July/August, 2005)“As the authors pointed out, the number of equations in the book is kept to a minimum, and important conceptions are also explained in a qualitative manner. A lot of very distinct images and schematic drawings make for a very interesting book and help readers who study scanning electron microscopy and X-ray microanalysis. The principal application and sample preparation given in this book are suitable for undergraduate students and technicians learning SEEM and EDS/WDS analyses. It is an excellent textbook for graduate students, and an outstanding reference for engineers, physical, and biological scientists.” (Microscopy and Microanalysis, Vol. 9 (5), October, 2003)

This text is written by a team of authors associated with SEM and X-ray Microanalysis Courses presented as part of the Lehigh University Microscopy Summer School. Several of the authors have participated in this activity for more than 30 years.

• Preface.- Scanning Electron Microscopy and Associated Techniques: Overview.- Electron Beam – Specimen Interactions: Interaction Volume.- Backscattered Electrons.- Secondary Electrons.- X-rays.- SEM Instrumentation.- Image Formation.- SEM Image Interpretation.- The Visibility of Features in SEM Images.- Image Defects.- High resolution imaging.- Low Beam Energy SEM.- Variable Pressure Scanning Electron Microscopy (VPSEM).- ImageJ and Fiji.- SEM Imaging checklist.- SEM Case Studies.- Energy Dispersive X-ray Spectrometry: Physical Principles and User-Selected Parameters.- DTSA-II EDS Software.- Qualitative Elemental Analysis by Energy Dispersive X-ray Spectrometry.- Quantitative Analysis: from k-ratio to Composition.- Quantitative analysis: the SEM/EDS elemental microanalysis k-ratio procedure for bulk specimens, step-by-step.- Trace Analysis by SEM/EDS.- Low Beam Energy X-ray Microanalysis.- Analysis of Specimens with Special Geometry: Irregular Bulk Objects and Particles.- CompositionalMapping.- Attempting Electron-Excited X-ray Microanalysis in the Variable Pressure Scanning Electron Microscope (VP-SEM).- Energy Dispersive X-ray Microanalysis Checklist.- X-ray Microanalysis Case Studies.- Cathodoluminescence.- Characterizing crystalline materials in the SEM.- Focused Ion Beam Applications in the SEM laboratory.- Ion Beam Microscopy.- Appendix – A Database of Electron-Solid Interactions.- Index.

Form the reviews of the third edition:“There is no other single volume that covers as much theory and practice of SEM or X-ray microanalysis as Scanning Electron Microscopy and X-ray Microanalysis, 3rd Edition does. It is clearly written ... well organized. ... This is a reference text that no SEM or EPMA laboratory should be without.” (Thomas J. Wilson, Scanning, Vol. 27 (4), July/August, 2005)“As the authors pointed out, the number of equations in the book is kept to a minimum, and important conceptions are also explained in a qualitative manner. A lot of very distinct images and schematic drawings make for a very interesting book and help readers who study scanning electron microscopy and X-ray microanalysis. The principal application and sample preparation given in this book are suitable for undergraduate students and technicians learning SEEM and EDS/WDS analyses. It is an excellent textbook for graduate students, and an outstanding reference for engineers, physical, and biological scientists.” (Microscopy and Microanalysis, Vol. 9 (5), October, 2003)

This text is written by a team of authors associated with SEM and X-ray Microanalysis Courses presented as part of the Lehigh University Microscopy Summer School. Several of the authors have participated in this activity for more than 30 years.

• Preface.- Scanning Electron Microscopy and Associated Techniques: Overview.- Electron Beam – Specimen Interactions: Interaction Volume.- Backscattered Electrons.- Secondary Electrons.- X-rays.- SEM Instrumentation.- Image Formation.- SEM Image Interpretation.- The Visibility of Features in SEM Images.- Image Defects.- High resolution imaging.- Low Beam Energy SEM.- Variable Pressure Scanning Electron Microscopy (VPSEM).- ImageJ and Fiji.- SEM Imaging checklist.- SEM Case Studies.- Energy Dispersive X-ray Spectrometry: Physical Principles and User-Selected Parameters.- DTSA-II EDS Software.- Qualitative Elemental Analysis by Energy Dispersive X-ray Spectrometry.- Quantitative Analysis: from k-ratio to Composition.- Quantitative analysis: the SEM/EDS elemental microanalysis k-ratio procedure for bulk specimens, step-by-step.- Trace Analysis by SEM/EDS.- Low Beam Energy X-ray Microanalysis.- Analysis of Specimens with Special Geometry: Irregular Bulk Objects and Particles.- CompositionalMapping.- Attempting Electron-Excited X-ray Microanalysis in the Variable Pressure Scanning Electron Microscope (VP-SEM).- Energy Dispersive X-ray Microanalysis Checklist.- X-ray Microanalysis Case Studies.- Cathodoluminescence.- Characterizing crystalline materials in the SEM.- Focused Ion Beam Applications in the SEM laboratory.- Ion Beam Microscopy.- Appendix – A Database of Electron-Solid Interactions.- Index.

Form the reviews of the third edition:“There is no other single volume that covers as much theory and practice of SEM or X-ray microanalysis as Scanning Electron Microscopy and X-ray Microanalysis, 3rd Edition does. It is clearly written ... well organized. ... This is a reference text that no SEM or EPMA laboratory should be without.” (Thomas J. Wilson, Scanning, Vol. 27 (4), July/August, 2005)“As the authors pointed out, the number of equations in the book is kept to a minimum, and important conceptions are also explained in a qualitative manner. A lot of very distinct images and schematic drawings make for a very interesting book and help readers who study scanning electron microscopy and X-ray microanalysis. The principal application and sample preparation given in this book are suitable for undergraduate students and technicians learning SEEM and EDS/WDS analyses. It is an excellent textbook for graduate students, and an outstanding reference for engineers, physical, and biological scientists.” (Microscopy and Microanalysis, Vol. 9 (5), October, 2003)