Laser Annealing Processes in Semiconductor Technology
Theory, Modeling and Applications in Nanoelectronics
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- Introduces the fundamentals of laser materials and device fabrication methods, including laser-matter interactions and laser-related phenomena
- Addresses advances in physical modeling and in predictive simulations of laser annealing processes such as atomistic modeling and TCAD simulations
- Reviews current and emerging applications of laser annealing processes such as CMOS technology and group IV semiconductors
Produktinformation
- Utgivningsdatum2021-04-23
- Mått152 x 229 x 22 mm
- Vikt700 g
- FormatHäftad
- SpråkEngelska
- SerieWoodhead Publishing Series in Electronic and Optical Materials
- Antal sidor426
- FörlagElsevier Science
- ISBN9780128202555