Over the nearly 20 years of Kelvin probe force microscopy, an increasing interest in the technique and its applications has developed. This book gives a concise introduction into the method and describes various experimental techniques. Surface potential studies on semiconductor materials, nanostructures and devices are described, as well as application to molecular and organic materials. The current state of surface potential at the atomic scale is also considered. This book presents an excellent introduction for the newcomer to this field, as much as a valuable resource for the expert.