Handbook of Mems for Wireless and Mobile Applications

Deepak Uttamchandani is Professor of Microsystems Engineering at the University of Strathclyde, UK. Since the late 1980s he has been conducting research in the field of microtechnology including: techniques for the characterisation of micromechanical properties of materials; optically excited microresonator sensors; commercial-foundry-centred microfabrication of MEMS in polysilicon and silicon-on-insulator, MEMS design and radio-frequency (RF) MEMS. He has edited 2 books, guest-edited 2 journals and authored/co-authored around 200 publications. He has been a member of the UK EPSRC ranking panels (responsible for government funding of engineering research), was a member of the Basic Technology programme (org. by the UK government to find emerging technologies) and served on one of the UK Dept of Trade and Industry (DTI) Technology Programme panels in 2004.

• Contributor contact detailsWoodhead Publishing Series in Electronic and Optical MaterialsDedicationPrefacePart I: RF MEMS as an enabling technology for wireless applicationsChapter 1: Overview of RF MEMS technology and applicationsAbstract:1.1 Introduction1.2 Radio frequency microelectromechanical systems (RF MEMS) operation principle and common realizations1.3 RF MEMS design challenges1.4 RF MEMS applications1.5 Conclusion1.6 Sources of further information and advice1.7 AcknowledgementsChapter 2: Overview of wireless techniques for use with MEMSAbstract:2.1 Introduction2.2 Transport layer issues2.3 Network layer mobility issues2.4 Data-link layer2.5 Physical layer2.6 The wireless link budget2.7 Physical layer system design2.8 ConclusionChapter 3: RF MEMS fabrication technologiesAbstract:3.1 Introduction3.2 MEMS-based technologies for RF circuits with enhanced quality factor and minimized losses3.3 Technologies for smart RF MEMS3.4 Highlights on specific key steps in RF MEMS fabrication3.5 Towards integrated technology for microsystem implementation3.6 Emerging technologies in wireless applications3.7 Conclusion3.8 AcknowledgementsChapter 4: RF MEMS passive components for wireless applicationsAbstract:4.1 Introduction4.2 RF MEMS passive components and their applications4.3 High-performance passive components enabled by RF MEMS technology4.4 Complex networks based on RF MEMS passive components4.5 ConclusionChapter 5: RF MEMS phase shifters for wireless applicationsAbstract:5.1 Introduction5.2 Switched-line phase shifter5.3 Loaded-line phase shifter5.4 Reflection-type phase shifter5.5 Distributed-line phase shifter5.6 Mixed-architectures and exotic phase shifters5.7 Towards global manufacturing5.8 Applications5.9 ConclusionChapter 6: RF MEMS antennas for wireless applicationsAbstract:6.1 Introduction6.2 RF MEMS antennas6.3 Reconfigurable feeding networks6.4 Reconfigurable antennas6.5 Design considerations6.6 Conclusion and future trends6.7 Sources of further information and adviceChapter 7: RF MEMS-based wireless architectures and front-endsAbstract:7.1 Introduction7.2 Communication standards7.3 Receivers, transmitters and transceivers: basic architectures7.4 Conventional component technology7.5 MEMS-based technology: filters, duplexers, switches, tunable devices and architecture7.6 Diversity in receivers and transmitters7.7 Multi-input multi-output (MIMO) systems7.8 Systems-on-a-chip7.9 ConclusionChapter 8: RF MEMS technology for next-generation wireless communicationsAbstract:8.1 Introduction8.2 RF MEMS technology8.3 RF MEMS technology for high-performance passive components8.4 Technology platform for the fabrication of RF MEMS complex circuits8.5 Some examples of high-performance devices enabled by the RF MEMS technology8.6 ConclusionChapter 9: Wafer-level packaging technology for RF MEMSAbstract:9.1 Introduction9.2 Wafer -level zero-level packaging for RF MEMSSS9.3 Electrical effects of the packaging material on the packaged devices9.4 Packaging with hard cap materials9.5 Packaging with a polymer cap9.6 ConclusionChapter 10: Reliability of RF MEMSAbstract:10.1 Introduction10.2 Overview of failure mechanisms in RF MEMS10.3 Charging in RF MEMS10.4 Analytical modelling10.5 Electrostatic discharge10.6 Reliability issues of MEMS packages10.7 ConclusionPart II: Wireless techniques and applications of wireless MEMSChapter 11: Energy harvesters for powering wireless systemsAbstract:11.1 Introduction11.2 Kinetic energy harvesters11.3 Design of kinetic energy harvesters11.4 Other typologies of energy harvesters11.5 Conclusion11.6 References11.7 Appendix: list of symbolsChapter 12: MEMS wireless implantable systems: historical review and perspectivesAbstract:12.1 Introduction12.2 Basic considerations and characteristics of wireless MEMS implantable systems12.3 Significant research on radio frequency implantable systems from 1955 to 197512.4 Progress of implantable systems from 1980 to 201012.5 Challenges of implantable/attached electronics12.6 Conclusion and future trends12.7 AcknowledgementsChapter 13: Wireless considerations in ocular implants based on microsystemsAbstract:13.1 Introduction13.2 Challenges of wireless ocular implants13.3 Considerations of ocular microsystems13.4 Applications of wireless microsystems in ocular implants13.5 Necessary improvements in wireless ocular implants13.6 ConclusionChapter 14: MEMS-based wireless intraocular pressure sensorsAbstract:14.1 Introduction14.2 Passive miniature implants for intraocular pressure (IOP) sensing14.3 Introduction of active MEMS systems for IOP implants14.4 Flexible parylene platforms for long-term MEMS implants14.5 Design of custom ultra-low-power autonomous IOP sensors14.6 Active and passive MEMS contact lenses for IOP monitoring14.7 ConclusionChapter 15: Drug delivery using wireless MEMSAbstract:15.1 Introduction15.2 Wireless power and data for drug delivery applications15.3 A MEMS approach to drug delivery15.4 Biological constraints and requirements15.5 Security concerns for wireless implants15.6 Wireless inductive powering and uni-directional data system for a MEMS drug pump15.7 Suggested improvements and future generation device15.8 Conclusion15.9 AcknowledgmentChapter 16: RF MEMS for automotive radarAbstract:16.1 Introduction16.2 RF MEMS components for automotive radar16.3 Examples of RF MEMS-based automotive radar front-end technology16.4 Unconventional MEMS radar beam-steering technologies16.5 ConclusionChapter 17: Telecommunications reliability monitoring using wireless MEMSAbstract:17.1 Introduction17.2 Typical reliability issues in telecommunication systems17.3 Reliability monitoring with wireless MEMS17.4 Case study: multi-MEMS platform17.5 Conclusion17.6 AcknowledgementsChapter 18: Optical MEMS for displays in portable systemsAbstract:18.1 Introduction18.2 MEMS-based direct-view displays18.3 Handheld picoprojectors18.4 Automobile head-up display18.5 Eyewear displays18.6 ConclusionIndex

"In my opinion this is an excellent book for MEMS in mobile communications" --Professor Hamed Al-Raweshidy, Director of the Wireless Networks and Communications Centre (WNCC), Brunel University, UK"An excellent introduction to the field for engineers and scientists; it identifies important capabilities and opportunities for MEMS in wireless sensing and communication." --Professor Yogesh B. Gianchandani, University of Michigan, USA"This comprehensive handbook will be a valuable resource to practitioners in the field, as well as to users and potential users of MEMS technology in wireless and mobile." --Professor Eric M. Yeatman, Imperial College London