Shuichi Miyazaki is a Professor at the Institute of Materials Science, University of Tsukuba, Japan, where he has worked since 1979 after obtaining his Ph.D. in Materials Science and Engineering from Osaka University. He has received numerous awards, including the Academic Deed Award from the Japan Institute of Metals in 1995 and the Yamazaki-Teiichi Prize from the Foundation for Promotion of Material Science and Technology of Japan in 2002, as well as co-authoring 24 books and over 350 technical and review papers in the field of materials science especially on shape memory alloys. Yong Qing Fu is a Lecturer in the Department of Mechanical Engineering at the Heriot-Watt University, Edinburgh. He obtained his Ph.D degree from Nanyang Technological University (NTU), Singapore in 1999 and his prior positions have included Research Fellow at Singapore-MIT Alliance, NTU and Research Associate in EDM Group (Electronic Devices and Materials) at Cambridge University. He has extensive experience in thin films, surface coatings, microelectromechanical systems (MEMS), shape memory alloys, smart materials and Nanotechnology, with over 100 journal papers. Wei Min Huang is an Associate Professor at the School of Mechanical and Aerospace Engineering at Nanyang Technological University (NTU), Singapore. He was awarded his Ph.D. from Cambridge University in 1998 and has since published over 80 journal papers. His research interests include shape memory materials, actuators, advanced technologies and materials, surface patterning and materials selection.

• Part I. Introduction S. Miyazaki, Y. Q. Fu and W. M. Huang; Part II. Technologies: 1. Overview of shape memory alloys and thin films S. Miyazaki, Y. Q. Fu and W. M. Huang; 2. Martensitic transformation S. Miyazaki; 3. Deposition techniques for TiNi films A. D. Johnson; 4. Ti/Ni multilayer thin films H. Cho and S. Miyazaki; 5. Film microstructure and crystallization A. G. Ramirez, X. Huang and H. J. Lee; 6. Mechanical properties A. Ishida; 7. Stress, texture, wrinkling and relief Y. Q. Fu, W. M. Huang, M. D. Cai and S. Zhang; 8. Ion irradiation T. LaGrange and R. Gotthardt; 9. Laser post annealing and theory W. M. Huang and M. H. Hong; Part III. Applications: 10. Overview of applications A. D. Johnson; 11. Theory on shape memory microactuator Y. C. Shu; 12. Binary and ternary alloy film diaphragm microactuators S. Miyazaki, M. Tomozawa and H. Y. Kim; 13. Microactuator applications K. P. Mohanchandra and G. Carman; 14. Microvalves M. Kohl; 15. Superelastic thin films and applications for medical devices C. Zamponi, R. L. De Miranda and E. Quandt; 16. Sputter-deposited Ti-Ni superelastic microtubes P. J. Buenconsejo, H. Y. Kim and S. Miyazaki; 17. Microcage-biopsy applications Y. Q. Fu, J. Luo, S. E. Ong and S. Zhang; 18. Shape memory thin film composite microactuators E. Quandt; 19. Micromirror application Y. Q. Fu, W. M. Huang and C. Y. Chung.

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Shuichi Miyazaki is a Professor at the Institute of Materials Science, University of Tsukuba, Japan, where he has worked since 1979 after obtaining his Ph.D. in Materials Science and Engineering from Osaka University. He has received numerous awards, including the Academic Deed Award from the Japan Institute of Metals in 1995 and the Yamazaki-Teiichi Prize from the Foundation for Promotion of Material Science and Technology of Japan in 2002, as well as co-authoring 24 books and over 350 technical and review papers in the field of materials science especially on shape memory alloys. Yong Qing Fu is a Lecturer in the Department of Mechanical Engineering at the Heriot-Watt University, Edinburgh. He obtained his Ph.D degree from Nanyang Technological University (NTU), Singapore in 1999 and his prior positions have included Research Fellow at Singapore-MIT Alliance, NTU and Research Associate in EDM Group (Electronic Devices and Materials) at Cambridge University. He has extensive experience in thin films, surface coatings, microelectromechanical systems (MEMS), shape memory alloys, smart materials and Nanotechnology, with over 100 journal papers. Wei Min Huang is an Associate Professor at the School of Mechanical and Aerospace Engineering at Nanyang Technological University (NTU), Singapore. He was awarded his Ph.D. from Cambridge University in 1998 and has since published over 80 journal papers. His research interests include shape memory materials, actuators, advanced technologies and materials, surface patterning and materials selection.

• Part I. Introduction S. Miyazaki, Y. Q. Fu and W. M. Huang; Part II. Technologies: 1. Overview of shape memory alloys and thin films S. Miyazaki, Y. Q. Fu and W. M. Huang; 2. Martensitic transformation S. Miyazaki; 3. Deposition techniques for TiNi films A. D. Johnson; 4. Ti/Ni multilayer thin films H. Cho and S. Miyazaki; 5. Film microstructure and crystallization A. G. Ramirez, X. Huang and H. J. Lee; 6. Mechanical properties A. Ishida; 7. Stress, texture, wrinkling and relief Y. Q. Fu, W. M. Huang, M. D. Cai and S. Zhang; 8. Ion irradiation T. LaGrange and R. Gotthardt; 9. Laser post annealing and theory W. M. Huang and M. H. Hong; Part III. Applications: 10. Overview of applications A. D. Johnson; 11. Theory on shape memory microactuator Y. C. Shu; 12. Binary and ternary alloy film diaphragm microactuators S. Miyazaki, M. Tomozawa and H. Y. Kim; 13. Microactuator applications K. P. Mohanchandra and G. Carman; 14. Microvalves M. Kohl; 15. Superelastic thin films and applications for medical devices C. Zamponi, R. L. De Miranda and E. Quandt; 16. Sputter-deposited Ti-Ni superelastic microtubes P. J. Buenconsejo, H. Y. Kim and S. Miyazaki; 17. Microcage-biopsy applications Y. Q. Fu, J. Luo, S. E. Ong and S. Zhang; 18. Shape memory thin film composite microactuators E. Quandt; 19. Micromirror application Y. Q. Fu, W. M. Huang and C. Y. Chung.

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Shuichi Miyazaki is a Professor at the Institute of Materials Science, University of Tsukuba, Japan, where he has worked since 1979 after obtaining his Ph.D. in Materials Science and Engineering from Osaka University. He has received numerous awards, including the Academic Deed Award from the Japan Institute of Metals in 1995 and the Yamazaki-Teiichi Prize from the Foundation for Promotion of Material Science and Technology of Japan in 2002, as well as co-authoring 24 books and over 350 technical and review papers in the field of materials science especially on shape memory alloys. Yong Qing Fu is a Lecturer in the Department of Mechanical Engineering at the Heriot-Watt University, Edinburgh. He obtained his Ph.D degree from Nanyang Technological University (NTU), Singapore in 1999 and his prior positions have included Research Fellow at Singapore-MIT Alliance, NTU and Research Associate in EDM Group (Electronic Devices and Materials) at Cambridge University. He has extensive experience in thin films, surface coatings, microelectromechanical systems (MEMS), shape memory alloys, smart materials and Nanotechnology, with over 100 journal papers. Wei Min Huang is an Associate Professor at the School of Mechanical and Aerospace Engineering at Nanyang Technological University (NTU), Singapore. He was awarded his Ph.D. from Cambridge University in 1998 and has since published over 80 journal papers. His research interests include shape memory materials, actuators, advanced technologies and materials, surface patterning and materials selection.

• Part I. Introduction S. Miyazaki, Y. Q. Fu and W. M. Huang; Part II. Technologies: 1. Overview of shape memory alloys and thin films S. Miyazaki, Y. Q. Fu and W. M. Huang; 2. Martensitic transformation S. Miyazaki; 3. Deposition techniques for TiNi films A. D. Johnson; 4. Ti/Ni multilayer thin films H. Cho and S. Miyazaki; 5. Film microstructure and crystallization A. G. Ramirez, X. Huang and H. J. Lee; 6. Mechanical properties A. Ishida; 7. Stress, texture, wrinkling and relief Y. Q. Fu, W. M. Huang, M. D. Cai and S. Zhang; 8. Ion irradiation T. LaGrange and R. Gotthardt; 9. Laser post annealing and theory W. M. Huang and M. H. Hong; Part III. Applications: 10. Overview of applications A. D. Johnson; 11. Theory on shape memory microactuator Y. C. Shu; 12. Binary and ternary alloy film diaphragm microactuators S. Miyazaki, M. Tomozawa and H. Y. Kim; 13. Microactuator applications K. P. Mohanchandra and G. Carman; 14. Microvalves M. Kohl; 15. Superelastic thin films and applications for medical devices C. Zamponi, R. L. De Miranda and E. Quandt; 16. Sputter-deposited Ti-Ni superelastic microtubes P. J. Buenconsejo, H. Y. Kim and S. Miyazaki; 17. Microcage-biopsy applications Y. Q. Fu, J. Luo, S. E. Ong and S. Zhang; 18. Shape memory thin film composite microactuators E. Quandt; 19. Micromirror application Y. Q. Fu, W. M. Huang and C. Y. Chung.

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