Surface and Interface Analysis

Seong H. Kim, PhD, is Distinguished Professor at the Department of Chemical Engineering of The Pennsylvania State University, USA. He is also affiliated with the Department of Materials Science and Engineering and the Department of Chemistry. He received his BS and MS degrees from Yonsei University, South Korea, and his PhD from Northwestern University, USA. He then worked as a postdoctoral researcher at the University of California, Berkeley, USA, before joining the faculty of chemical engineering at Penn State.

• Preface xiAbout the Companion Website xv1 Introduction 11.1 Types of Surface Analysis 11.2 Why Is Surface Analysis Done in Vacuum? 11.3 Surface Energy 61.4 Relationship Between Surface Energy and Physical Properties 81.5 Measuring Surface Energy 101.6 Bulk Properties Affected by Surface Energy 141.7 Further Reading for Surface Contamination and Vacuum 16Practice Problems 16References 172 Elemental Analysis via X-ray Irradiation 192.1 Electron Emission upon X-ray Absorption 192.2 Instrumentation for X-ray Photoelectron Spectroscopy (XPS) 272.3 Qualitative Analysis with XPS 372.4 Quantitative Analysis with XPS 482.5 Depth Profiling with XPS 682.6 Chemical Analysis with X-ray Absorption Spectroscopy (XAS) 732.7 Further Reading for XPS 78Practice Problems 79References 843 Elemental Analysis via Electron Irradiation 893.1 Principle of Auger Electron Spectroscopy (AES) 893.2 Qualitative Analysis with AES 933.3 Quantitative Analysis with AES 963.4 Scanning Auger Mapping 973.5 Further Reading for AES 99Practice Problems 100References 1004 Elemental Analysis via Ion Irradiation 1034.1 Principle of Secondary Ion Mass Spectrometry (SIMS) 1034.2 Qualitative Analysis with SIMS 1064.3 Quantitative Analysis with SIMS 1114.4 Further Reading for SIMS 112Practice Problems 112References 1135 Light Propagation, Absorption, and Reflection 1155.1 Propagation and Absorption of Electromagnetic Wave 1165.2 Reflection/Refraction at Interface of Two Media 1285.3 Further Reading for IR and Raman Spectroscopy 139Practice Problems 139References 1396 Spectroscopic Analysis via IR Reflection and Transmission 1416.1 Attenuated Total Reflectance Infrared (ATR-IR) Spectroscopy 1436.2 Specular Reflection Infrared (SR-IR) Spectroscopy 1516.3 Reflection Absorption Infrared Spectroscopy (RAIRS) 1586.4 Brewster-Angle Transmission (BAT) Infrared Spectroscopy 1766.5 Diffuse-Reflectance Infrared Fourier Transform (DRIFT) Spectroscopy 1806.6 IR Spectroscopic Imaging 1836.7 Further Reading for Surface-Sensitive IR Spectroscopy 192Practice Problems 192References 1937 Buried Interface Analysis via Nonlinear Spectroscopy 1977.1 Nonlinear vs. Linear Optical Responses 1977.2 Sum Frequency Generation (SFG) Process 2007.3 SFG Spectroscopy Probing 2D Interface 2117.4 SFG Spectroscopy Probing Noncentrosymmetric Domains in 3D Bulk 2337.5 Further Reading for SFG 251Practice Problems 251References 2538 Multivariate Data Analysis 2578.1 Least Squares Analysis 2588.2 Factor Analysis 2618.3 Matrix Algebra for Principal Component Analysis (PCA) and Principal Component Regression (PCR) 2638.4 Further Reading for Multivariate Analysis 281Practice Problems 281References 2829 Thin Film Analysis via Reflectometry and Ellipsometry 2839.1 Recap of Light Reflection and Transmission Principles 2839.2 Reflectometry 2859.3 Ellipsometry 2889.4 Spectroscopic Ellipsometry (SE) 2959.5 Mueller Matrix Ellipsometry (MME) 3069.6 Further Reading for Ellipsometry 314Practice Problems 314References 31510 Topography Analysis via Light Reflection 31710.1 White Light Interferometry (WLI) 31710.2 Surface Roughness 32610.3 Further Reading of Optical Profilometry 328Practice Problems 328References 32911 Topography Analysis via Scanning Probe 33111.1 Tip–Sample Interactions in Atomic Force Microscopy (AFM) 33111.2 Force Measurement Through Cantilever Deflection 33911.3 Cantilever Oscillation in Noncontact and Tapping Mode AFM 34111.4 Surface Deformation in Contact Mode AFM 34511.5 Scanning AFM Probe 34811.6 Material Properties Measured Along with Topography 35711.7 Further Reading for AFM 362Practice Problems 362References 36512 Mechanical Analysis via Indentation 36912.1 Modulus, Hardness, and Toughness 36912.2 Nanoindentation 37112.3 Micro-indentation 37512.4 Hidden Factors Affecting Indentation Measurement 37912.5 Further Reading for Nanoindentation 388Practice Problems 388References 391Index 393