Silicon Anodization as a Structuring Technique
Literature Review, Modeling and Experiments
Häftad, Engelska, 2017
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Fri frakt för medlemmar vid köp för minst 249 kr.Alexey Ivanov investigates the application of a silicon anodization process as a three-dimensional structuring technique, where silicon is transformed into porous silicon as a sacrificial layer or directly dissolved in electropolishing regime. The work contains a detailed state of the art, experimental studies and modeling of the process for basic shape controlling techniques. Limitations of the developed FEM model with secondary current distribution are discussed.
Produktinformation
- Utgivningsdatum2017-09-22
- Mått148 x 210 x undefined mm
- FormatHäftad
- SpråkEngelska
- Antal sidor316
- FörlagSpringer Fachmedien Wiesbaden
- ISBN9783658192372