RF MEMS and Their Applications

Vijay K. Varadan, Department of Electrical Engineering, University of Arkansas, Fayetteville, Arizona, USAVijay Varadan is an established Wiley author and is currently a Professor in the Department of Electrical Engineering at the University of Arkansas, USA. Varadan's new book for Wiley, Smart Material Systems and MEMS, is due to publish later this year, and he has previously co-authored Microwave Electronics, RF MEMS and their Applications, Microsensors, MEMS and Smart Devices and Microstereolithography and other Fabrication Techniques for 3D MEMS. He is also Editor-in-Chief of the SPIE's Journal of Smart Materials and Structures.K. J. Vinoy is an Assistant Professor in the Department of Electrical Communication Engineering at the Indian Institute of Science, Bangalore, India. He received an M.Tech degree in Electronics from the Cochin University of Science and Technology, India and a Ph.D. degree in Engineering Science and Mechanics from the Pennsylvania State University, USA, in 1993 and 2002, respectively. From 1994 to 1998, he worked at the National Aerospace Laboratories, Bangalore, India. Following this, he was a research assistant at the Center for the Engineering of Electronic and Acoustic Materials and Devices (CEEAMD) at the Pennsylvania State University from 1999 to 2002. He continued there to carry out postdoctoral research from 2002 to August 2003. His research interests include several aspects of microwave engineering, RF-MEMS and smart material systems. He has published over 50 papers in technical journals and conference proceedings. His other publications include two books, namely Radar Absorbing Materials: From Theory to Design and Characterization, and RF-MEMS and their Applications. He also holds one US patent.K. A. Jose is the author of RF MEMS and Their Applications, published by Wiley.

• Preface. Microelectromechanical Systems (MEMS) and Radio Frequency MEMS.MEMS Materials and Fabrication Techniques.RF MEMS Switches and Micro Relays.MEMS Inductors and Capacitors.Micromachined RF Filters.Micromachined  Phase Shifters.Micromachined Transmission Lines and Components.Micromachined Antennae.Integration and Packaging for RF MEMS Devices.Index.