Research into and development of high-precision systems, micro-electromechanical syustems, distributed sensors/actuators, smart structural systems, high-precision controls, etc, have drawn much attention in recent years. These new devices and systems will bring about a new technological revolution in modern industries and impact future human life. This book presents an overview of these technologies such as silicon based sensors/actuators and control piezoelectric micro sensors/actuators, micro actuation and control, micro sensor applications in robot control, optical fibre sensors/systems, and more. There are four main subjects emphasized in the book: (current) research and development; fundamental theories and tools; practical applications; and future research and development.