Del i serien Microsystems and Nanosystems

Piezoelectric MEMS Resonators

Häftad, Engelska, 2018

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This book introduces piezoelectric microelectromechanical (pMEMS) resonators to a broad audience by reviewing design techniques including use of finite element modeling, testing and qualification of resonators, and fabrication and large scale manufacturing techniques to help inspire future research and entrepreneurial activities in pMEMS.

Produktinformation

Utgivningsdatum2018-07-12
Mått155 x 235 x 24 mm
Vikt657 g
FormatHäftad
SpråkEngelska
SerieMicrosystems and Nanosystems
Antal sidor424
FörlagSpringer International Publishing AG
ISBN9783319804057

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