Physics of Micro/Nano-Fabrication

Inbunden, Engelska, 1993

Av Ivor Brodie, Julius J. Muray, Ivor Brodie, Julius J. Muray

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In this revised and expanded edition, the authors provide a comprehensive overview of the tools, technologies, and physical models needed to understand, build, and analyze microdevices. Students, specialists within the field, and researchers in related fields will appreciate their unified presentation and extensive references.