Physical Design and Mask Synthesis for Directed Self-Assembly Lithography 1
bokomslag Physical Design and Mask Synthesis for Directed Self-Assembly Lithography
Vetenskap & teknik

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Seongbo Shim • Youngsoo Shin

Inbunden

1429:-

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  • 138 sidor
  • 2018
This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.
  • Författare: Seongbo Shim, Youngsoo Shin
  • Format: Inbunden
  • ISBN: 9783319762937
  • Språk: Engelska
  • Antal sidor: 138
  • Utgivningsdatum: 2018-04-03
  • Förlag: Springer International Publishing AG

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