Physical Design and Mask Synthesis for Directed Self-Assembly Lithography 1

Vetenskap & teknik

Physical Design and Mask Synthesis for Directed Self-Assembly Lithography

Seongbo Shim • Youngsoo Shin

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138 sidor
2019

This book discusses physical design and mask synthesis of directed self-assembly lithography (DSAL). It covers the basic background of DSAL technology, physical design optimizations such as placement and redundant via insertion, and DSAL mask synthesis as well as its verification. Directed self-assembly lithography (DSAL) is a highly promising patterning solution in sub-7nm technology.

Författare: Seongbo Shim, Youngsoo Shin
Format: Pocket/Paperback
ISBN: 9783030094553
Språk: Engelska
Antal sidor: 138
Utgivningsdatum: 2019-02-08
Förlag: Springer Nature Switzerland AG