Physical and Technical Problems of SOI Structures and Devices 1

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Physical and Technical Problems of SOI Structures and Devices

J-P Colinge • Vladimir S Lysenko • Alexei N Nazarov

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290 sidor
2012

In Physical and Technical Problems of SOI Structures and Devices, specialists in silicon-on-insulator technology from both East and West meet for the first time, giving the reader the chance to become acquainted with work from the former Soviet Union, hitherto only available in Russian and barely available to western scientists. Keynote lectures and state-of-the-art presentations give a wide-ranging panorama of the challenges posed by SOI materials and devices, material fabrication techniques, characterisation, device and circuit issues.

Författare: J-P Colinge, Vladimir S Lysenko, Alexei N Nazarov
Format: Pocket/Paperback
ISBN: 9789401040525
Språk: Engelska
Antal sidor: 290
Utgivningsdatum: 2012-10-21
Förlag: Springer