Optical MEMS, Nanophotonics, and Their Applications

Prof. Guangya Zhou received the B.Eng. and Ph.D. degrees in optical engineering from Zhejiang University, Hangzhou, China. His PhD thesis was on micro optics and diffractive optics. He was a post-doctoral fellow at state key laboratory of thin film and microfabrication technology at Shanghai Jiao Tong University conducting research on optical MEMS for telecommunication systems. He has been a research fellow at the School of Electrical and Electronic Engineering at Nanyang Technological University. He is now an associate professor in the Department of Mechanical Engineering, National University of Singapore. His research covers optical MEMS scanners, MEMS spectrometers and hyperspectral imagers, optical MEMS based ultra-compact endoscope probes, silicon nanophotonics, NEMS tunable photonic crystals, and nano scale optomechanics. He has published about 90 research papers in peerreviewed international journals, and is the main inventor of the MEMS-driven vibratory grating scanner, MEMS-based miniature zoom lens system with autofocus function, and miniature MEMS-based adjustable aperture. The latter two were successfully licensed to a start-up company, where he currently works as a technical advisor.Prof. Vincent C. Lee received his PhD from The University of Tokyo in 1996. He has served as JST Research Fellow at AIST, MITI of Japan, Senior Research Staff Member of the Microsystems Laboratory, Industrial Technology Research Institute, Hsinchu, Manager of the MEMS Device Division of Metrodyne Microsystem Corporation, Hsinchu, Adjunct Assistant Professor with the Electro-Physics Department, National Chiao Tung University, Hsinchu, and Adjunct Assistant Professor with the Institute of Precision Engineering, National Chung Hsing University, Taichung, Taiwan. He cofounded Asia Pacific Microsystems, Inc., Hsinchu, where he was a Vice President, and also was a Senior Member of the Technical Staff at the Institute of Microelectronics, A*STAR, Singapore. Currently, he is an Associate Professor with the Department of Electrical and Computer Engineering, National University of Singapore, Singapore. He is the co-author of Advanced MEMS Packaging (McGraw-Hill, 2010). He has contributed to more than 230 international conference papers and extended abstracts and 160 peer-reviewed international journal articles in the fields of Optical MEMS, NEMS, nanophotonics and nanotechnology. He holds nine U.S. patents.

• Section I Optical MEMS for communication, imaging, and sensing applications1 Optical MEMS: An introductionGuangya Zhou and Chengkuo Lee2 MEMS optical scanners for laser projection displayHiroshi Toshiyoshi3 Optical micro-electrical-mechanical phased arrayYoumin Wang and Ming-Chiang Wu4 Optical MEMS for space: Design, characterization, and applicationsFrederic Zamkotsian5 MEMS vibratory grating scanners and their applicationsGuangya Zhou6 F–P filters and applications in spectrometers and gas sensingChong Pei Ho and Chengkuo Lee7 Electrothermally actuated MEMS mirrors: Design, modeling, and applicationsHuikai Xie, Xiaoyang Zhang, Liang Zhou, and Sagnik Pal8 MEMS tunable optics: Liquid and solid methodsYongchao Zou and Guangya ZhouSection II Nanophotonics for communication, imaging, and sensing applications9 Physical sensors based on photonic crystalsBo Li and Chengkuo Lee10 Silicon photonic variable waveguide coupler devicesKazuhiro Hane11 Metasurface and ultrathin optical devicesXianzhong Chen, Dandan Wen, and Fuyong Yue12 Optical micro- and nanoresonators for biochemical sensingXingwang Zhang, Liying Liu, Lei Xu, Xudong Fan, and Guangya Zhou13 Terahertz MEMS metamaterialsPrakash Pitchappa and Chengkuo LeeSection III Biomicro- and nanophotonics and optofluidics for health care applications14 Optofluidic devices and their applicationsSung-Yong Park15 Implantable CMOS microphotonic devicesJun Ohta and Takashi Tokuda16 Microfluidic photocatalysisNing Wang and Xuming Zhang