Del i serien Intelligent Systems, Control and Automation: Science and Engineering

Microsystems Dynamics

Inbunden, Engelska, 2010

AvVytautas Ostasevicius,Rolanas Dauksevicius

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In recent years microelectromechanical systems (MEMS) have emerged as a new technology with enormous application potential. This book provides coverage of the state-of-the-art of this rapidly developing field.

Produktinformation

Utgivningsdatum2010-11-11
Mått155 x 235 x 26 mm
Vikt482 g
FormatInbunden
SpråkEngelska
SerieIntelligent Systems, Control and Automation: Science and Engineering
Antal sidor214
FörlagSpringer
ISBN9789048197002

Tillhör följande kategorier

Foreword.- Preface.- Introduction to Microsystems.- Fabrication Technologies of Microsystems.- Overview.- Nickel Surface Micromachining Technology for Fabrication of Microswitches.- UV Lithography for Fabrication of Micromotors.- Common MEMS Actuators.- Parallel Plate Capacitors.- Comb Drives.- Electrostatic Micromotors.- Electrostatic Microswitches.- Theoretical Background of Multiphysical Interactions Common in Microsystems.- Introduction to Coupled-Field Modeling.- Electrostatic Actuation and Pull-in Instability.- Viscous Air Damping.- Vibro-Impact Interactions.- Experimental Testing of Microsystem Dynamics.- Vibration Excitation Methods.- Optical Techniques for Measurement of Vibrations of Microstructures.- Study of Elastic Vibro-Impact Macrosystems and Microsystems.- Overview of Important New Effects of Nonlinear Dynamics in Vibro-Impact.- Macrosystems.- .- Analysis of Coupled-Field Dynamics in Contact-Type Electrostatic Microactuator.- Numerical Modeling and Analysis of Fluidic-Structural Interaction.- Numerical Modeling and Analysis of Electrostatic-Structural Interaction.- Numerical Modeling and Analysis of Vibro-Impact Interaction.- Numerical Analysis of the Micromotor.- Finite Element Modeling of Micromotor.- Modal Analysis.- Micromotor Control.- Analytical Model of a Micromotor.- Basics of Micromotor Geometry.- Torque Analysis.- Micromotor Design Guidelines.- References.