Micro-Manufacturing

Muammer Koç, PhD, is the Director of National Science Foundation (NSF)-Industry/University Cooperative Research Center (I/UCRC) on Precision Forming (CPF), Associate Professor in the Department of Mechanical Engineering at Virginia Commonwealth University; and Associate Professor of Department of Industrial Engineering at Istanbul Sehir University. His research interests include manufacturing processes and systems, micro-manufacturing, design of nano/micro-scale functional surface structures, and product innovation. Tuğrul Özel, PhD, is the Director of Manufacturing Automation Research Laboratory and Associate Professor in the Department of Industrial and Systems Engineering at Rutgers University in New Jersey. His research interests include manufacturing processes and automated systems, computational modeling of machining processes, laser-based micro/nano processing, and design and manufacturing of micro-products.

• Foreword viiContributors ix1 Fundamentals of Micro-Manufacturing 12 Micro-Fabrication Processes in Semiconductor Industry 253 Modeling and Analysis at Micro-Scales 434 Metrology, Inspection, and Process Control in Micro-Scales 715 Micro-Layered Manufacturing 976 Micro-Laser Processing 1597 Polymer Micro-Molding/Forming Processes 1978 Mechanical Micro-Machining 2359 Micro-Forming 27510 Micro-Electro Discharge Machining (μEDM) 30111 Metal Injection Molding at Micro-Scales (μMIM) 347Index 371

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