Micro Electromechanical Systems (MEMS)

SANKET GOEL, PH.D., is a Professor with the Department of Electrical and Electronics Engineering and Principal Investigator with the MEMS, Microfluidics and Nanoelectronics (MMNE) Lab at BITS Pilani, Hyderabad Campus, Hyderabad, India.

• About the Editor xvList of Contributors xviiPreface xxiAbout the Companion Website xxix1 Multiphysics Simulations on the Effect of Fluidic Concentration Profiles Over Y-Channel and T-Channel Designs 1Pavar Sai Kumar and Sanket Goel1.1 Introduction 11.2 Real-Time Applications of This Study 21.3 Simulation Section 21.4 Results and Discussions 31.5 Conclusion 10References 102 Droplet Generation in T-Junction Microchannel Using Multiphysics Software 13Abhishek Kumar and Sanket Goel2.1 Introduction 132.2 Simulation Section 152.3 Result and Discussion 172.4 Conclusion 17References 183 Cleanroom-Assisted and Cleanroom-Free Photolithography 21Abhishesh Pal, Satish Kumar Dubey, and Sanket Goel3.1 Introduction 213.2 Photolithography Basics, Classification and Applications 223.3 Experimental Section on Designing and Development of Features Using Photolithography 253.4 Conclusion 26References 274 Additive Manufacturing (3D Printing) 29Pavar Sai Kumar, Abhishek Kumar, and Sanket Goel4.1 Stereolithography (SLA) Printing of Y-Channeled Microfluidic Chip 294.2 Fused Deposition Modeling (FDM): Fabrication of Single Electrode Electrochemiluminescence Device 34References 375 Laser Processing 41Pavar Sai Kumar, Abhishek Kumar, Manish Bhaiyya, and Sanket Goel5.1 CO 2 Laser for Electrochemical Sensor Fabrication 415.2 One-Step Production of Reduced Graphene Oxide from Paper via 450 nm Laser Ablations 455.3 Conclusion 50References 506 Soft Lithography: DLW-Based Microfluidic Device Fabrication 53K. Ramya and Sanket Goel6.1 Introduction 536.2 Designing Section 546.3 Conclusion 57References 577 Electrode Fabrication Techniques 59Sanjeet Kumar, Abhishek Kumar, K.S. Deepak, Manish Bhaiyya, Aniket Balapure, Satish Kumar Dubey, and Sanket Goel7.1 Inkjet Printing Technique: Electrode Fabrication for Advanced Applications 597.2 Screen Printing Technique for Electrochemical Sensor Fabrication 627.3 Physical Vapor Deposition (PVD) Technique for Electrode Fabrication 667.4 Conclusion 69References 698 Morphological Characterization 71Dhoni Nagaraj, Yuvraj Maphrio Mao, Parvathy Nair, Sanjeet Kumar, Imran Khan, Amreen Khairunnisa, R.N. Ponnalagu, Satish Kumar Dubey, and Sanket Goel8.1 Morphological Studies with Different Techniques 718.2 Scanning Electron Microscopy 718.3 Steps Involved in the Scanning Electron Microscope Characterization 728.4 X-Ray Diffraction (XRD) 748.5 Optical LED Microscope 798.6 Contact Angle 83References 879 Spectroscopic Characterization 89Himanshi Awasthi, N.K. Nishchitha, Sonal Fande, and Sanket Goel9.1 Introduction 899.2 Ultraviolet-Visible (UV-Vis) Spectrophotometers 909.3 X-Ray Photoelectron Spectroscopy (XPS) 929.4 Raman Spectroscopy 979.5 Fourier Transform Infrared (FTIR) Spectroscopy 100References 10410 Microfluidic Devices 105Abhishesh Pal, Pavar Sai Kumar, Sreerama Amrutha Lahari, Sonal Fande, Abhishek Kumar, Manish Bhaiyya, Sohan Dudala, R.N. Ponnalagu, Satish Kumar Dubey, and Sanket Goel10.1 Electrochemical Detection of Bacteria, Biomarkers, Biochemical, and Environmental Pollutants 10510.2 Microfluidics Integrated Electrochemiluminescence System for Hydrogen Peroxide Detection 11410.3 Development of Microfluidic Chip for Colorimetric Analysis 11810.4 Development of Disposable and Eco-Friendly μPADs as Chemiluminescence Substrates 12310.5 Microfluidic Devices for Polymerase Chain Reaction (PCR) 128References 13111 Wearable Devices 135Ramya Priya Pujari, S. Vanmathi, Satish Kumar Dubey, and Sanket Goel11.1 Application of Laser-Induced Graphene in Breath Analysis 13511.2 Wearable Microfluidic Device for Nucleic Acid Amplification 13811.3 Wearable Patch Biofuel Cell 142References 14512 Energy Devices 147Himanshi Awasthi, S. Vanmathi, and Sanket Goel12.1 Introduction 14712.2 Enzymatic Biofuel Cells and Microbial Fuel Cells 15012.3 Microbial Fuel Cells (MFCs) 15312.4 Electrochemical Characterization of Supercapacitor Energy Devices 156References 16013 Conclusion and Future Outlook 163Amreen KhairunnisaIndex 165