Micro and Nanoscale Laser Processing of Hard Brittle Materials

Jiwang Yan is Professor at the Department of Mechanical Engineering at Keio University, Japan, where he heads up the Yan Laboratory. He is also Adjunct Professor at Tokyo Institute of Technology, Japan. His research interests the laser processing of materials, and ultraprecision and micro and nano manufacturing. Nozomi Takayama is a researcher at Yan Laboratory, Department of Mechanical Engineering at Keio University, Japan. Her research interest focus on laser processing.

• 1. Introduction2. Fundamentals of laser processing 3. Laser-material interactions 4. Laser processing technologies 5. Micromachining of single-crystal diamond 6. Micromachining of microstructures on sapphire 7. Laser healing of microcracks in glass 8. Laser recovery of silicon single crystals 9. Surface modification of silicon carbide 10. Modification of surface property of alumina sprayed coating 11. Laser sintering of silicon powder and carbon nanofibers 12. Micropillar formation from silicon powder 13. Surface structuring of silicon 14. Summary and outlook