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MEMS Mechanical Sensors
Steve P Beeby • Graham Ensel • Michael E Kraft • Neil M White • Stephen Beeby
1969:-
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The main aim of this book is to give an overview of MEMS mechanical transducers. The text focuses mainly on examples of commercial and research devices; however, attention is also given to manufacturing techniques and materials, as well as the basic principles behind the operation of these devices.
- Format: Laminated cover
- ISBN: 9781580535366
- Språk: Engelska
- Utgivningsdatum: 2004-04-30
- Förlag: Artech House Publishers