Laser Technology

Kashmiri Lal Mittal was employed by the IBM Corporation from 1972 through 1993 Currently, he is teaching and consulting worldwide in the broad areas of adhesion as well as surface cleaning. He has received numerous awards and honors including the title of doctor honoris causa from Maria Curie-Sklodowska University, Lublin, Poland. He is the editor of more than 130 books dealing with adhesion measurement, adhesion of polymeric coatings, polymer surfaces, adhesive joints, adhesion promoters, thin films, polyimides, surface modification surface cleaning, and surfactants. Dr. Mittal is also the Founding Editor of the journal Reviews of Adhesion and Adhesives. Wei-Sheng Lei is a senior technologist at Applied Materials, Inc. on developing advanced technologies and high-value, high-volume manufacturing equipment solutions for laser precision materials engineering applications. He holds a PhD in materials science from Harbin Institute of Technology of China and a Dr. rer. nat. degree in solid mechanics from RWTH Aachen University of Germany. Dr. Lei is the co-inventor of over 100 patents in the US and other countries, and has published more than 100 papers in peer-reviewed journals and conferences.

• Preface xiiiPart 1: Laser Surface Modification and Adhesion Enhancement 11 Topographical Modification of Polymers and Metals by Laser Ablation to Create Superhydrophobic Surfaces 3Frank L. Palmieri and Christopher J. Wohl1.1 Introduction 31.2 Wetting Theory 61.3 Laser Ablation Background 121.3.1 Ablation Mechanics 121.3.2 Ablation in Metals 131.3.3 Ablation in Polymers 161.4 Preparation of Superhydrophobic Surfaces by Laser Ablation 181.4.1 Hydrophobic Organic Substrates 181.4.2 Hydrophilic Organic Substrates 261.4.3 Hydrophilic Substrates with Hydrophobic Coatings 321.4.4 Hydrophilic Inorganic Substrates 431.4.4.1 Metallic substrates 441.4.4.2 Silicon substrates 511.4.4.3 Ceramic Substrates 551.5 Summary 56References 572 Nonablative Laser Surface Modification 69Andy Hooper2.1 Introduction 692.2 Part 1 – Nonablative Laser Skin Photorejuvenation 702.2.1 Introduction 702.2.2 Nonablative Laser-Based Skin Treatments 722.2.3 Review of Nonablative Laser-Based Skin Treatments Based on Laser Type 732.2.3.1 Lasers Emitting at 532 nm 732.2.3.2 Lasers Emitting at 511, 578, 585, and 600 nm Wavelengths 752.2.3.3 Lasers Emitting at 780 nm 762.2.3.4 Lasers Emitting at 980 nm 762.2.3.5 Lasers Emitting at 1064 nm 762.2.3.6 Lasers Emitting at 1320 nm 772.2.3.7 Lasers Emitting at 1450 nm 782.2.3.8 Lasers Emitting at 1540 nm 782.2.3.9 Lasers Emitting at 2940 nm 802.2.4 Combined Techniques 812.2.5 Conclusions for Part 1 – Nonablative Laser Skin Photorejuvenation 812.3 Part 2 –Formation of Micro-/Nano-Structures and LIPSS in Materials by Nonablative Laser Processing 822.3.1 Introduction 822.3.2 Review of Micro-/Nano-Structures and LIPSS 832.3.2.1 Micro-/Nano-Structures and LIPSS Formation in Metals 832.3.2.2 Micro-/Mano-Structures and LIPSS Formation in Semiconductors 852.3.2.3 Micro-/Nano-Structures and LIPSS Formation in Dielectrics 862.3.2.4 Micro-/Nano-Structures and LIPSS Formation in Polymers 862.3.2.5 Micro-/Nano-Structures and LIPSS Formation in Multiple Materials 872.3.3 Part 2 –Conclusion for Formation of Micro-/Nano-Structures and LIPSS in Materials by Nonablative Laser Processing 872.4 Part 3 – Nonablative Laser Surface Modification to Alter the Surface Properties of Materials 872.4.1 Introduction 882.4.2 Examples of Nonablative Laser Surface Modification to Alter the Surface Properties of Materials 882.4.3 Conclusions for Part 3 – Nonablative Laser Surface Modification to Alter Surface Properties 922.5 Summary 93References 943 Wettability Characteristics of Laser Surface Engineered Polymers 99D.G. Waugh and J. Lawrence3.1 Introduction 993.2 Lasers for Surface Engineering 1013.2.1 Infrared Lasers for Surface Engineering 1013.2.2 Ultraviolet Lasers for Surface Engineering 1023.2.3 Ultrafast Pulsed Lasers for Surface Engineering 1043.3 Laser Surface-Engineered Topography 1053.4 Laser Surface-Engineered Wettability 1103.5 Summary 116References 1174 Laser Surface Modification for Adhesion Enhancement 123Wei-Sheng Lei and Kash Mittal4.1 Introduction 1244.1.1 Mechanisms or Theories of Adhesion 1244.1.2 Methods of Surface Modification for Adhesion Enhancement 1264.2 Basic Mechanisms of Laser Surface Modification 1274.2.1 Absorption of Laser Radiation in a Material 1284.2.1.1 Linear Absorption 1294.2.1.2 Nonlinear Absorption 1294.2.2 Photo-Chemical Process 1304.2.3 Photo-Thermal Process 1324.2.3.1 Conventional Heat Flow Model 1324.2.3.2 Two-Temperature Model 1354.2.3.3 Ablation Rate and Ablation Spot Size 1374.3 Laser Induced Surface Modification of Metal Substrates to Enhance Adhesion 1384.3.1 Laser Induced Surface Cleaning and Activation for Adhesion Improvement 1384.3.2 The Dominant Role of Mechanical Interlocking for Adhesion Improvement 1414.3.3 Laser Surface Patterning 1424.3.4 Laser Surface Topography Modification to Enhance Adhesion of Hard Coatings on Metals 1454.3.5 Laser Surface Modification to Enhance Metal-to-Metal Adhesive Bonding 1504.3.6 Laser Surface Modification of Metal Substrates to Enhance Adhesion of Polymeric Materials 1554.4 Laser Induced Surface Modification of Polymers and Composites to Enhance Their Adhesion 1584.4.1 Adhesion Improvement due to Laser Treatment 1594.4.2 Changes in Surface Morphology of Laser Treated Surfaces 1634.4.3 Chemical Modification of Laser Treated Surfaces 1644.5 Summary 167References 1685 Laser Surface Modification in Dentistry: Effect on the Adhesion of Restorative Materials 175Regina Guenka Palma-Dibb, Juliana Jendiroba Faraoni, Walter Raucci-Neto and Alessandro Dibb5.1 Introduction 1755.2 Dental Structures 1805.3 Adhesion of Restorative Materials 1855.4 Laser Light Interaction with the Dental Substrate 1905.5 Dental Structure Ablation and Influence on Bond Strength of Restorative Materials 1935.6 Summary 2005.7 Prospects 200References 200Part 2: Other Applications 2096 Laser Polymer Welding 211Rolf Klein6.1 Introduction to Laser Polymer Welding 2116.2 Theoretical Background 2136.2.1 Reflection, Transmission and Absorption Behaviors 2136.2.2 Heat Generation and Dissipation 2266.2.3 Laser Welding Processes 2396.3 Factors Affecting Polymer Laser Welding 2426.3.1 Types of Processes for TTLW 2426.3.2 Adapting Absorption to Welding Process 2506.3.3 Design of Joint Geometry 2556.4 Practical Applications 2576.5 Testing and Quality Control 2616.6 Future Prospects 2636.7 Summary 263Acknowledgements 263References 2667 Laser Based Adhesion Testing Technique to Measure Thin Film-Substrate Interface Toughness 269Soma Sekhar V. Kandula7.1 Introduction 2707.2 Modification of Laser Spallation Technique to Measure Thin Film-Substrate Interface Fracture Toughness 2757.2.1 Sample Preparation 2777.2.2 Experimental Procedure and Analysis 2787.3 Parametric Studies 2837.3.1 Effect of Test Film Thickness 2847.3.2 Effect of Amplitude of the Stress Pulse 2857.3.3 Effect of Shape of the Stress Pulse 2867.3.4 Effect of Thin Film Properties 2867.3.5 Effect of Thin Film Inertial Layer 2887.3.6 Effect of Amplitude and Gradient of Residual Stresses on the Thin Film Delamination 2897.4 Validation of Dynamic Delamination Protocol 2907.5 Summary 294References 2948 Laser Induced Thin Film Debonding for Micro-Device Fabrication Applications 299Wei-Sheng Lei and Zhishui Yu8.1 Introduction 2998.2 The Mechanism of Laser Induced Debonding (LID) 3018.3 Thin Film Patterning by Laser Induced Forward Transfer 3068.3.1 Background 3068.3.2 Thin Film Transfer Mechanisms in a LIFT Process 3088.4 GaN Film Lift-Off for High-Brightness LEDs and High Power Electronics 3098.4.1 Background 3098.4.2 The Laser Lift-Off Process 3118.5 Dielectric Passivation Layer Opening for Interconnect Formation in Crystalline Silicon Solar Cells 3138.5.1 Background 3138.5.2 Laser Process for Making Local Contact Openings 3148.6 Laser Induced Wafer Debonding for Advanced Packaging Applications 3168.6.1 Background 3168.6.2 The Laser Induced Wafer Debonding Process 3188.7 Summary 319References 3209 Laser Surface Cleaning: Removal of Hard Thin Ceramic Coatings 325S. Marimuthu, A.M. Kamara, M F Rajemi, D. Whitehead, P. Mativenga and L. Li9.1 Introduction 3269.2 Chemical Etching of Hard Thin Coatings 3289.3 Typical Experimental Set-up for Excimer Laser Removal of Thin Coatings 3289.4 Experimental Results on Excimer Laser Removal of Thin Coatings 3299.4.1 Laser Removal of Titanium Nitride from Tungsten Carbide 3299.4.1.1 Removal of Titanium Nitride from Tungsten Carbide Cutting Insert 3299.4.1.2 Removal of Titanium Nitride from Tungsten Carbide Micro-Tool 3329.4.2 Laser Removal of Titanium Aluminium Nitride from Tungsten Carbide 3389.4.3 Laser Removal of CrTiAlN Coatings from High Speed Steel 3459.5 Online Monitoring of Laser Coating Removal Process 3549.5.1 Online Monitoring Using Probe Beam Reflection (PBR) System 3559.5.2 Online Monitoring Using Laser Plume Emission Spectroscopy 3579.6 Discussion of Excimer Laser Coating Removal Mechanisms 3589.7 Finite Element Modelling of Excimer Laser Removal of Thin Coatings 3629.8 Performance Evaluation of Laser Decoated Mechanical Tool 3669.8.1 Evaluation of Wear Performance 3669.8.2 Surface Roughness of Machined Parts 3679.8.3 Environmental Footprints in Cutting 3689.8.4 Energy Consumption and Footprints for Laser Decoating 3709.8.5 Comparison of the Energy Footprints for the Different Steps 3719.9 Summary 372Acknowledgments 373References 37310 Laser Removal of Particles from Surfaces 379Changho Seo, Hyesung Shin and Dongsik Kim10.1 Introduction 38010.2 Dry Laser Cleaning (DLC) 38210.3 Steam Laser Cleaning (SLC) 38610.4 Laser Shock Cleaning (LSC) 39510.5 Novel Laser Cleaning Techniques 40010.5.1 Matrix Laser Cleaning (MLC) 40010.5.2 Wet Laser Cleaning (WLC) 40110.5.3 Wet Laser Shock Cleaning (WLSC) 40210.5.4 Combination of DLC and LSC 40210.5.5 Combination of LSC and SLC 40210.5.6 Laser-Induced Thermocapillary Cleaning 40310.5.7 Droplet Opto-Hydrodynamic Cleaning (DOC) 40310.6 Summary 404Acknowledgements 407References 408Index 417