Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.
Fabrication.- The substrate and adding material to it.- Creating and transferring patterns#x2014;Photolithography.- Creating structures#x2014;Micromachining.- Solid mechanics.- Applications.- Thinking about modeling.- MEMS transducers#x2014;An overview of how they work.- Piezoresistive transducers.- Capacitive transducers.- Piezoelectric transducers.- Thermal transducers.- to microfluidics.- Laboratories.- Microfabrication laboratories.
