Introductory MEMS

Fabrication and Applications

Häftad, Engelska, 2014

AvThomas M. Adams,Richard A. Layton

1 119 kr

Beställningsvara. Skickas inom 10-15 vardagar. Fri frakt för medlemmar vid köp för minst 249 kr.

Finns i fler format (1)

Inbunden

1 389 kr

Skickas inom 10-15 vardagar

Introductory MEMS: Fabrication and Applications is a practical introduction to MEMS for advanced undergraduate and graduate students. Part I introduces the student to the most commonly used MEMS fabrication techniques as well as the MEMS devices produced using these techniques.

Produktinformation

Utgivningsdatum2014-09-07
Mått155 x 235 x 27 mm
Vikt696 g
FormatHäftad
SpråkEngelska
Antal sidor440
FörlagSpringer-Verlag New York Inc.
ISBN9781489984210

Tillhör följande kategorier

Fabrication.- The substrate and adding material to it.- Creating and transferring patterns#x2014;Photolithography.- Creating structures#x2014;Micromachining.- Solid mechanics.- Applications.- Thinking about modeling.- MEMS transducers#x2014;An overview of how they work.- Piezoresistive transducers.- Capacitive transducers.- Piezoelectric transducers.- Thermal transducers.- to microfluidics.- Laboratories.- Microfabrication laboratories.