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Designed for advanced undergraduate or first-year graduate courses in semiconductor or microelectronic fabrication, the third edition of Fabrication Engineering at the Micro and Nanoscale provides a thorough and accessible introduction to all fields of micro and nano fabrication.
- Format: Pocket/Paperback
- ISBN: 9780195320176
- Språk: Engelska
- Antal sidor: 672
- Utgivningsdatum: 2008-01-01
- Förlag: OUP USA