Fangzhou Xia is a Research Scientist, jointly appointed in the of Mechanical Engineering Department and Physics Department at the Massachusetts Institute of Technology. He received his Ph.D. in Mechanical Engineering from Massachusetts Institute of Technology (MIT), Cambridge, MA, USA, in 2020. His research interests include precision mechatronics, physical/computational intelligence, controls, nano-robotics, and instrumentation with applications in scanning probe microscopy, biomedical devices, and industrial automation. Dr. Ivo W. Rangelow is a University Professor in the Production and Precision Metrology Department at Ilmenau University of Technology. He received his Ph.D. with “summa cum laude” from Wroclaw University of Technology, Poland, in 1982. His research interests include nanofabrication, semiconductor devices, vacuum microelectronics, embedded systems, transducer technology, and scanning probe sciences. Dr. Kamal Youcef-Toumiis a Professor in the Department of Mechanical Engineering at the Massachusetts Institute of Technology. He received his Sc.D. degree in Mechanical Engineering from the Massachusetts Institute of Technology (MIT), Cambridge, MA, USA, in 1985. His research interests include modeling, design, instrumentation, control theory and their applications to dynamic systems.

• Introduction.- Active Probe Design and Fabrication .- Advanced Applications of Active Probes.- Atomic Force Microscope Designs.- AFM System using Active Probe.- A Low-cost AFM Design for Engineering Education.- Appendix.

Fangzhou Xia is a Research Scientist, jointly appointed in the of Mechanical Engineering Department and Physics Department at the Massachusetts Institute of Technology. He received his Ph.D. in Mechanical Engineering from Massachusetts Institute of Technology (MIT), Cambridge, MA, USA, in 2020. His research interests include precision mechatronics, physical/computational intelligence, controls, nano-robotics, and instrumentation with applications in scanning probe microscopy, biomedical devices, and industrial automation. Dr. Ivo W. Rangelow is a University Professor in the Production and Precision Metrology Department at Ilmenau University of Technology. He received his Ph.D. with “summa cum laude” from Wroclaw University of Technology, Poland, in 1982. His research interests include nanofabrication, semiconductor devices, vacuum microelectronics, embedded systems, transducer technology, and scanning probe sciences. Dr. Kamal Youcef-Toumiis a Professor in the Department of Mechanical Engineering at the Massachusetts Institute of Technology. He received his Sc.D. degree in Mechanical Engineering from the Massachusetts Institute of Technology (MIT), Cambridge, MA, USA, in 1985. His research interests include modeling, design, instrumentation, control theory and their applications to dynamic systems.

• Introduction.- Active Probe Design and Fabrication .- Advanced Applications of Active Probes.- Atomic Force Microscope Designs.- AFM System using Active Probe.- A Low-cost AFM Design for Engineering Education.- Appendix.

Fangzhou Xia is a Research Scientist, jointly appointed in the of Mechanical Engineering Department and Physics Department at the Massachusetts Institute of Technology. He received his Ph.D. in Mechanical Engineering from Massachusetts Institute of Technology (MIT), Cambridge, MA, USA, in 2020. His research interests include precision mechatronics, physical/computational intelligence, controls, nano-robotics, and instrumentation with applications in scanning probe microscopy, biomedical devices, and industrial automation. Dr. Ivo W. Rangelow is a University Professor in the Production and Precision Metrology Department at Ilmenau University of Technology. He received his Ph.D. with “summa cum laude” from Wroclaw University of Technology, Poland, in 1982. His research interests include nanofabrication, semiconductor devices, vacuum microelectronics, embedded systems, transducer technology, and scanning probe sciences. Dr. Kamal Youcef-Toumiis a Professor in the Department of Mechanical Engineering at the Massachusetts Institute of Technology. He received his Sc.D. degree in Mechanical Engineering from the Massachusetts Institute of Technology (MIT), Cambridge, MA, USA, in 1985. His research interests include modeling, design, instrumentation, control theory and their applications to dynamic systems.

• Introduction.- Active Probe Design and Fabrication .- Advanced Applications of Active Probes.- Atomic Force Microscope Designs.- AFM System using Active Probe.- A Low-cost AFM Design for Engineering Education.- Appendix.