Handbook of Silicon Based MEMS Materials and Technologies
Tilli,Markk, Markku Tilli, Mervi Paulasto-Kr�ckel, Matthias Petzold, Horst Theuss, Teruaki Motooka, Veikko Lindroos, Mervi Paulasto-Kröckel, Finland (retired)) Tilli, Markku (Director and Senior Vice President of Research, Okmetic, Finland) Paulasto-Krockel, Mervi (Aalto University, School of Electrical Engineering, Germany) Petzold, Matthias (Professor, Fraunhofer Institute for Microstructure of Materials and Systems IMWS, Germany) Theuss, Horst (Lead Principal, Infineon Technologies, AG, Japan) Motooka, Teruaki (Professor Emeritus, Department of Materials Science and Engineering, Kyushu University, Finland) Lindroos, Veikko (Professor Emeritus, Physical Metallurgy and Materials Science, Aalto University
Häftad
3 599 kr