Nanometer-scale Defect Detection Using Polarized Light

Pierre Richard Dahoo is Professor at the University of Versailles Saint-Quentin in France. His research interests include absorption spectroscopy, laser-induced fluorescence, ellipsometry, optical molecules, industrial materials, modeling and simulation. He is program manager of the Chair Materials Simulation and Engineering of UVSQ.Philippe Pougnet is a Doctor in Engineering. He is an expert in reliability and product-process technology at Valeo and is currently working for the Vedecom Institute in Versailles, France. He is in charge of assessing the reliability of innovative power electronic systems.Abdelkhalak El Hami is Professor at the Institut National des Sciences Appliquées (INSA-Rouen) in France and is in charge of the Normandy Conservatoire National des Arts et Metiers (CNAM) Chair of Mechanics, as well as several European pedagogical projects.

• Preface xiChapter 1. Uncertainties 11.1. Introduction  11.2. The reliability based design approach 21.2.1. The MC method 21.2.2. The perturbation method  31.2.3. The polynomial chaos method 71.3. The design of experiments method  91.3.1. Principle  91.3.2. The Taguchi method 101.4. The set approach 141.4.1. The method of intervals 151.4.2. Fuzzy logic based method 181.5. Principal component analysis  201.5.1. Description of the process 211.5.2. Mathematical roots 221.5.3. Interpretation of results 221.6. Conclusions  23Chapter 2. Reliability-based Design Optimization 252.1. Introduction  252.2. Deterministic design optimization 262.3. Reliability analysis  272.3.1. Optimal conditions  302.4. Reliability-based design optimization 312.4.1. The objective function  312.4.2. Total cost consideration 322.4.3. The design variables 332.4.4. Response of a system by RBDO  332.4.5. Limit states 332.4.6. Solution techniques  332.5. Application: optimization of materials of an electronic circuit board 342.5.1. Optimization problem  362.5.2. Optimization and uncertainties 392.5.3. Results analysis  432.6. Conclusions 44Chapter 3. The Wave–Particle Nature of Light 473.1. Introduction 483.2. The optical wave theory of light according to Huyghens and Fresnel 493.2.1. The three postulates of wave optics  493.2.2. Luminous power and energy  513.2.3. The monochromatic wave  513.3. The electromagnetic wave according to Maxwell’s theory  523.3.1. The Maxwell equations 523.3.2. The wave equation according to the Coulomb’s gauge 563.3.3. The wave equation according to the Lorenz’s gauge  573.4. The quantum theory of light 573.4.1. The annihilation and creation operators of the harmonic oscillator  573.4.2. The quantization of the electromagnetic field and the potential vector  613.4.3. Field modes in the second quantization  66Chapter 4. The Polarization States of Light  714.1. Introduction 714.2. The polarization of light by the matrix method  734.2.1. The Jones representation of polarization 764.2.2. The Stokes and Muller representation of polarization 814.3. Other methods to represent polarization 864.3.1. The Poincaré description of polarization 864.3.2. The quantum description of polarization 884.4. Conclusions  93Chapter 5. Interaction of Light and Matter 955.1. Introduction  955.2. Classical models 975.2.1. The Drude model  1035.2.2. The Sellmeir and Lorentz models 1055.3. Quantum models for light and matter 1115.3.1. The quantum description of matter  1115.3.2. Jaynes–Cummings model  1185.4. Semiclassical models 1235.4.1. Tauc–Lorentz model 1275.4.2. Cody–Lorentz model  1305.5. Conclusions  130Chapter 6. Experimentation and Theoretical Models 1336.1. Introduction  1346.2. The laser source of polarized light 1356.2.1. Principle of operation of a laser  1366.2.2. The specificities of light from a laser 1416.3. Laser-induced fluorescence 1436.3.1. Principle of the method 1436.3.2. Description of the experimental setup  1456.4. The DR method  1456.4.1. Principle of the method 1466.4.2. Description of the experimental setup  1486.5. Theoretical model for the analysis of the experimental results  1496.5.1. Radiative relaxation 1526.5.2. Non-radiative relaxation  1536.5.3. The theoretical model of induced fluorescence 1606.5.4. The theoretical model of the thermal energy transfer 1636.6. Conclusions  170Chapter 7. Defects in a Heterogeneous Medium  1737.1. Introduction 1737.2. Experimental setup  1757.2.1. Pump laser 1767.2.2. Probe laser 1767.2.3. Detection system 1777.2.4. Sample preparation setup  1807.3. Application to a model system  1827.3.1. Inert noble gas matrix  1827.3.2. Molecular system trapped in an inert matrix 1847.3.3. Experimental results for the induced fluorescence 1887.3.4. Experimental results for the double resonance  1987.4. Analysis by means of theoretical models 2037.4.1. Determination of experimental time constants  2037.4.2. Theoretical model for the induced fluorescence 2097.4.3. Theoretical model for the DR  2147.5. Conclusions 216Chapter 8. Defects at the Interfaces  2198.1. Measurement techniques by ellipsometry 2198.1.1. The extinction measurement technique  2228.1.2. The measurement by rotating optical component technique 2238.1.3. The PM measurement technique  2248.2. Analysis of results by inverse method 2258.2.1. The simplex method 2328.2.2. The LM method  2348.2.3. The quasi-Newton BFGS method 2378.3. Characterization of encapsulating material interfaces of mechatronic assemblies  2378.3.1. Coating materials studied and experimental protocol  2398.3.2. Study of bulk coatings  2418.3.3. Study of defects at the interfaces  2448.3.4. Results analysis  2518.4. Conclusions 253Chapter 9. Application to Nanomaterials  2559.1. Introduction 2559.2. Mechanical properties of SWCNT structures by MEF 2569.2.1. Young's modulus of SWCNT structures 2589.2.2. Shear modulus of SWCNT structures  2599.2.3. Conclusion on the modeling results  2609.3. Characterization of the elastic properties of SWCNT thin films 2609.3.1. Preparation of SWCNT structures 2619.3.2. Nanoindentation 2629.3.3. Experimental results 2639.4. Bilinear model of thin film SWCNT structure  2659.4.1. SWCNT thin film structure 2669.4.2. Numerical models of thin film SWCNT structures 2689.4.3. Numerical results  2699.5. Conclusions  274Bibliography 275Index 293