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A comprehensive guide to 3D MEMS packaging methods and solutions

Written by experts in the field, Advanced MEMS Packaging serves as a valuable reference for those faced with the challenges created by the ever-increasing interest in MEMS devices and packaging. This authoritative guide presents cutting-edge MEMS (microelectromechanical systems) packaging techniques, such as low-temperature C2W and W2W bonding and 3D packaging.

This definitive resource helps you select reliable, creative, high-performance, robust, and cost-effective packaging techniques for MEMS devices. The book will also aid in stimulating further research and development in electrical, optical, mechanical, and thermal designs as well as materials, processes, manufacturing, testing, and reliability. Among the topics explored:

Advanced IC and MEMS packaging trends
MEMS devices, commercial applications, and markets
More than 360 MEMS packaging patents and 10 3D MEMS packaging designs
TSV for 3D MEMS packaging
MEMS wafer thinning, dicing, and handling
Low-temperature C2C, C2W, and W2W bonding
Reliability of RoHS-compliant MEMS packaging
Micromachining and water bonding techniques
Actuation mechanisms and integrated micromachining
Bubble switch, optical switch, and VOA MEMS packaging
Bolometer and accelerameter MEMS packaging
Bio-MEMS and biosensor MEMS packaging
RF MEMS switches, tunable circuits, and packaging

Cheng Lee - Böcker

Advanced MEMS Packaging