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Thin film technology is used in many applications such as microelectronics, optics, hard and corrosion resistant coatings and micromechanics, and thin films form a uniquely versatile material base for the development of novel technologies within these industries. Thin film growth provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin films.
Part one focuses on the theory of thin film growth, with chapters covering nucleation and growth processes in thin films, phase-field modelling of thin film growth and surface roughness evolution. Part two covers some of the techniques used for thin film growth, including oblique angle deposition, reactive magnetron sputtering and epitaxial growth of graphene films on single crystal metal surfaces. This section also includes chapters on the properties of thin films, covering topics such as substrate plasticity and buckling of thin films, polarity control, nanostructure growth dynamics and network behaviour in thin films.
With its distinguished editor and international team of contributors, Thin film growth is an essential reference for engineers in electronics, energy materials and mechanical engineering, as well as those with an academic research interest in the topic.
Provides an important and up-to-date review of the theory and deposition techniques used in the formation of thin films
Focusses on the theory and modelling of thin film growth, techniques and mechanisms used for thin film growth and properties of thin films
An essential reference for engineers in electronics, energy materials and mechanical engineering
Zexian Cao is a Professor at the Institute of Physics of the Chinese Academy of Sciences in Beijing, China.
Contributor contact detailsPrafacePart I: Theory of thin film growthChapter 1: Measuring nucleation and growth processes in thin filmsAbstract:1.1 Introduction1.2 Basic theory of epitaxial growth1.3 Observation method of atomic steps1.4 Two-dimensional-island nucleation and step-flow growth modes1.5 The motion of atomic steps on a growing and evaporating Si(111) surface1.6 Morphological instability of atomic steps1.7 Conclusion and future trends1.9 AppendixChapter 2: Quantum electronic stability of atomically uniform filmsAbstract:2.1 Introduction2.2 Electronic growth2.3 Angle-resolved photoemission spectroscopy2.4 Atomically uniform films2.5 Quantum thermal stability of thin films2.6 General principles of film stability and nanostructure development2.7 Beyond the particle-in-a-box2.8 Future trends2.9 AcknowledgmentsChapter 3: Phase-field modeling of thin film growthAbstract:3.1 Introduction3.2 Modeling3.3 Numerical results3.4 ConclusionChapter 4: Analysing surface roughness evolution in thin filmsAbstract:4.1 Introduction4.2 Roughness during homo-epitaxial growth4.3 Roughness during hetero- or non-epitaxial growth4.4 Future trendsChapter 5: Modelling thin film deposition processes based on real-time observationAbstract:5.1 Introduction: time resolved surface science5.2 Basics of growth and relevant length of and timescales for in-situ observation of film deposition5.3 Experimental techniques for real-time and in-situ studies5.4 Experimental case studies5.5 Future trends5.6 Sources of further information and advicePart II: Techniques of thin film growthChapter 6: Silicon nanostructured films grown on templated surfaces by oblique angle depositionAbstract:6.1 Introduction6.2 Preparation of templated surface for oblique angle deposition6.3 Fan-out on templated surface with normal incident flux6.4 Fan-out growth on templated surfaces with oblique angle incident flux6.5 Control of fan-out growth with substrate rotations6.6 Applications and future trendsChapter 7: Phase transitions in colloidal crystal thin filmsAbstract:7.1 Introduction7.2 Experimental tools7.3 Description of colloidal crystal phases: historical survey7.4 Phase transition sequence in colloidal crystal thin films7.5 Conclusions and future trends7.6 AcknowledgementsChapter 8: Thin film growth for thermally unstable noble-metal nitrides by reactive magnetron sputteringAbstract:8.1 Introduction8.2 Deposition of stoichiometric Cu3N8.3 Nitrogen re-emission8.4 Doping of Cu3N by co-sputtering8.5 ConclusionsChapter 9: Growth of graphene layers for thin filmsAbstract:9.1 Introduction9.2 Large-scale pattern growth of graphene films for stretchable transparent electrodes9.3 Roll-to-roll production of 30-inch graphene films for transparent electrodes9.4 ConclusionsChapter 10: Epitaxial growth of graphene thin films on single crystal metal surfacesAbstract:10.1 Introduction10.2 Structure of graphene on metals10.3 Growth of graphene on a metal10.4 Future trends10.5 Sources of further information and advice10.6 AcknowledgementsChapter 11: Electronic properties and adsorption behaviour of thin films with polar characterAbstract:11.1 Introduction to oxide polarity11.2 Polar oxide films11.3 Measuring polarity of thin oxide films11.4 Adsorption properties of polar films11.5 Conclusion and future trends11.7 Acknowledgements11.6 Sources of further information and adviceChapter 12: Polarity controlled epitaxy of III-nitrides and ZnO by molecular beam epitaxyAbstract:12.1 Introduction12.2 Lattice polarity and detection methods12.3 Polarity issues at heteroepitaxy and homoepitaxy12.4 Polarity controlled epitaxy of GaN and AlN12.5 Polarity controlled epitaxy of InN12.6 Polarity controlled epitaxy of ZnO12.7 ConclusionsChapter 13: Understanding substrate plasticity and buckling of thin filmsAbstract:13.1 Introduction13.2 Experimental observations13.3 Modelling13.4 Discussion13.5 ConclusionsChapter 14: Controlled buckling of thin films on compliant substrates for stretchable electronicsAbstract:14.1 Introduction14.2 Mechanics of one-dimensional non-coplanar mesh design14.3 Mechanics of two-dimensional non-coplanar mesh design14.4 ConclusionsChapter 15: The electrocaloric effect (ECE) in ferroelectric polymer filmsAbstract:15.1 Introduction15.2 Thermodynamic considerations on materials with large electrocaloric effect (ECE)15.3 Previous investigations on electrocaloric effect (ECE) in polar materials15.4 Large electrocaloric effect (ECE) in ferroelectric polymer films15.5 Future trends15.6 Conclusion15.7 AcknowledgementsChapter 16: Network behavior in thin films and nanostructure growth dynamicsAbstract:16.1 Introduction16.2 Origins of network behavior during thin film growth16.3 Monte Carlo simulations16.4 Results and discussion16.5 ConclusionsIndex
