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Microelectromechanical sytems (MEMS) applications in RF and microwave electronics are revolutionizing wireless communications. This text provides a comprehensive explanation of the fabrication and fundamental physics of MEMS and their applications in electronic communication systems. The book integrates circuit fabrication technology, device design-oriented materials, mechanical and microwave considerations, and RF/microwave electronics to give engineers and managers a clear understanding of the potential and limitations of MEMS in electronic communications.
H?ctor J. De Los Santos is a Scientist/Director of Future Enabling Technologies IR&D Program at the Hughes Space and Communications Company. He holds a Ph.D. in Electrical Engineering from Purdue University and is Senior Member of the IEEE and Member of Tau Beta Pi, Eta Kappa Nu, and Sigma Xi..
Microelectromechanical systems - MEMS origins; MEMS impetus/motivation; MEMS fabrication technologies; fundamental MEMS device physics - actuation; fundamental MEMS devices - the cantilever beam; microwave MEMS applications - MEM switch design considerations; the micromachined transmission line; MEMS-based microwave circuits and systems.