Adhesion Aspects in MEMS/NEMS 1
bokomslag Adhesion Aspects in MEMS/NEMS

Adhesion Aspects in MEMS/NEMS

Seong H Kim • Michael T Dugger • Kash L Mittal

Inbunden

4819:-

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  • 410 sidor
  • 2011
This book discusses equilibrium vapor adsorption and capillary force, and effects of contacting surfaces on MEMS device reliability. It serves as a fountainhead for new research ideas and new application vistas and enhances the performance and durability/robustness of MEMS/NEMS.
  • Författare: Seong H Kim, Michael T Dugger, Kash L Mittal
  • Format: Inbunden
  • ISBN: 9789004190948
  • Antal sidor: 410
  • Utgivningsdatum: 2011-02-18
  • Förlag: Brill

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