Vacuum Physics and Techniques

Vacua are fundamental to a range of scientific explorations and technological processes; the range now extends from studies of the properties of atomically clean surfaces at pressures which verge on extreme ultrahigh vacuum, 10-12 mbar, to freeze drying of foodstuffs at pressures which may be only 10-1 mbar. In the pressure range between, vacua are required for TV tube production, vacuum impregnation, vacuum furnaces, vacuum coating, storage ring operation and semiconductor processing. There have been advances and improvements made in vacuum technology, particularly in the last 20 years. It is the purpose of this book to try to introduce the reader to the basic physics which underlie modern technology, and then to show how it is applied in vacuum production and measurement. As far as possible, everything described in this book is in use. "Vacuum Physics and Technology" covers important topics in modern vacuum physics and should enable the reader to understand the problems associated with vacuum system design and pressure management.