Sub-Half-Micron Lithography for Ulsis 1
bokomslag Sub-Half-Micron Lithography for Ulsis
Vetenskap & teknik

Sub-Half-Micron Lithography for Ulsis

Katsumi Suzuki • Shinji Matsui • Yukinori Ochiai

Pocket

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  • 344 sidor
  • 2005
  • Författare: Katsumi Suzuki, Shinji Matsui, Yukinori Ochiai
  • Format: Pocket/Paperback
  • ISBN: 9780521022347
  • Språk: Engelska
  • Antal sidor: 344
  • Utgivningsdatum: 2005-08-30
  • Förlag: Cambridge University Press

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