Silicon Sensors and Circuits

• On-chip functional integration. Development of compatible micromachining processes in silicon. Compatibility of piezoelectric zinc oxide with silicon IC processing. Economics of on-chip functional integration. On-chip functional integration in micromechanical sensors. Sensor and circuit integration in biomedical applications. Smart sensors in automobiles. Conclusions. Glossary. Index.

This book evaluates the real prospects and limitations of integrated silicon sensors. It provides a thorough introduction to the field, considering transduction effects, micromaching processes and zinc-oxide-on-silicon devices. - Aslib Book Guide; It provides a thorough introduction to and review of the field, covering both technical and economic issues critical to the future success of this techology. - Sensors and Materials; ...this book has a great deal to offer students and practicing control engineers throughout industry and research. - Control and Instrumentation; ...an interesting and thought-provoking account of integrated silicon-sensors, and would recommend it as a useful introduction to the topic...an in-depth study of the technology. - Measurement and Control