Silicon Micromachining
Häftad, Engelska, 2004
Av The Netherlands) Elwenspoek, M. (University of Twente, Enschede, The Netherlands) Jansen, H. V. (University of Twente, Enschede, Miko Elwenspoek, Henri V. Jansen, M. Elwenspoek
1 179 kr
Beställningsvara. Skickas inom 7-10 vardagar
Fri frakt för medlemmar vid köp för minst 249 kr.This comprehensive book provides an overview of the key techniques used in the fabrication of micron-scale structures in silicon. It is a blend of detailed experimental and theoretical material, and will be of great interest to graduate students and researchers in electrical engineering and materials science whose work involves the study of micro-electromechanical systems (MEMS).
Produktinformation
- Utgivningsdatum2004-08-19
- Mått189 x 247 x 22 mm
- Vikt773 g
- FormatHäftad
- SpråkEngelska
- SerieCambridge Studies in Semiconductor Physics and Microelectronic Engineering
- Antal sidor420
- FörlagCambridge University Press
- ISBN9780521607674