Plasma Processes for Semiconductor Fabrication 1
bokomslag Plasma Processes for Semiconductor Fabrication
Vetenskap & teknik

Plasma Processes for Semiconductor Fabrication

W N G Hitchon • Haroon Ahmad • Michael Pepper

Pocket

1269:-

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Andra format:

  • 232 sidor
  • 2005
Self-contained book providing an up-to-date description of plasma etching and deposition in semiconductor fabrication. Presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. Suitable as a graduate-level textbook, and will also be a useful reference for practising engineers in the semiconductor industry.
  • Författare: W N G Hitchon, Haroon Ahmad, Michael Pepper
  • Format: Pocket/Paperback
  • ISBN: 9780521018005
  • Språk: Engelska
  • Antal sidor: 232
  • Utgivningsdatum: 2005-09-29
  • Förlag: Cambridge University Press

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