Data & IT
Plasma Processes for Semiconductor Fabrication
W N G Hitchon • W Nicholas G Hitchon • W Nicholas G Hitchon • Haroon Ahmad • Michael Pepper
Inbunden
2149:-
Uppskattad leveranstid 5-10 arbetsdagar
Fri frakt för medlemmar vid köp för minst 249:-
Self-contained book providing an up-to-date description of plasma etching and deposition in semiconductor fabrication. Presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. Suitable as a graduate-level textbook, and will also be a useful reference for practising engineers in the semiconductor industry.
- Format: Inbunden
- ISBN: 9780521591751
- Språk: Engelska
- Antal sidor: 232
- Utgivningsdatum: 1999-01-28
- Förlag: Cambridge University Press