Plasma Processes for Semiconductor Fabrication

Inbunden, Engelska, 1999

Av W. N. G. Hitchon, W. Nicholas G. Hitchon, Haroon Ahmad, Michael Pepper

2 639 kr

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Self-contained book providing an up-to-date description of plasma etching and deposition in semiconductor fabrication. Presents the basic physics and chemistry of these processes, and shows how they can be accurately modelled. Suitable as a graduate-level textbook, and will also be a useful reference for practising engineers in the semiconductor industry.

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