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An interdisciplinary work offering an introduction to the basic principles and operational characteristics of semiconductor sensors. Describes sensor technology, stressing bulk and surface micromachining. Considers a sensor group related to a special physical, chemical or biological input signal. The final chapter deals with integrated sensors. Each chapter includes a summary, problem sets and a discussion of future sensor trends.
- Format: Inbunden
- ISBN: 9780471546092
- Språk: Engelska
- Antal sidor: 576
- Utgivningsdatum: 1994-11-01
- Förlag: Wiley-Interscience