Nanoelectromechanical Systems

Inbunden, Engelska, 2015

Av Laurent Duraffourg, Julien Arcamone, L Duraffourg, S?bastien Hentz

2 249 kr

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This book will present the theoretical and technological elements of nanosystems. Among the different topics discussed, the authors include the electromechanical properties of NEMS, the scaling effects that give these their interesting properties for different applications and the current manufacturing processes. The authors aim to provide useful tools for future readers and will provide an accurate picture of current and future research in the field.

Produktinformation

Utgivningsdatum2015-06-16
Mått163 x 241 x 20 mm
Vikt476 g
FormatInbunden
SpråkEngelska
Antal sidor212
FörlagISTE Ltd and John Wiley & Sons Inc
ISBN9781848216693

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PREFACE viiPHYSICAL CONSTANTS ixNOTATIONS xiCHAPTER 1. FROM MEMS TO NEMS 11.1. Micro- and nanoelectromechanical systems: an overview 11.2. Conclusion 9CHAPTER 2. TRANSDUCTION ON THE NANOMETRIC SCALE AND THE NOTION OF NOISE 132.1. Mechanical transfer function 142.2. Transduction principles 202.2.1. The actuation of nanostructures 232.2.2. Detection 312.3. Self-oscillation and noises 492.4. Conclusion 58CHAPTER 3. MONOLITHIC INTEGRATION OF NEMS WITH THEIR READOUT ELECTRONICS 613.1. Foreword 613.1.1. Why integrate NEMS with their readout electronics? 613.1.2. What are the differences between MEMS-CMOS and NEMS-CMOS? 623.2. The advantages of and main approaches to monolithic integration 643.2.1. A comparison of integration schemes and their electrical performance 643.2.2. Closed-loop NEMS-CMOS oscillators: the essential building block for NEMS-based frequency sensors 693.2.3. Overview of the main achievements from the perspective of manufacturing technology 703.3. Analysis of some significant achievements from the perspective of transduction 753.3.1. Examples of capacitive NEMS-CMOS 753.3.2. Examples of piezoresistive NEMS-CMOS 823.3.3. Alternative approaches 853.4. Conclusions and future perspectives 86CHAPTER 4. NEMS AND SCALING EFFECTS 894.1. Introduction 894.1.1. Intrinsic losses 964.1.2. Extrinsic losses 974.2. Near field effect in a nanostructure: Casimir force 1024.2.1. Intuitive explanation of the Casimir force 1024.2.2. The problem 1054.2.3. Rigorous calculation of the Casimir force between two silicon slabs 1074.2.4. Impact of the Casimir force in a nano-accelerometer 1134.2.5. Conclusion 1174.3. Example of “intrinsic” scaling effects: electrical conduction laws 1174.3.1. Electrical resistivity 1174.3.2. Piezoresistive effect 1254.4. Optomechanical nano-oscillators and quantum optomechanics 1364.5. Conclusion 147CHAPTER 5. CONCLUSION AND APPLICATION PROSPECTS: FROM FUNDAMENTAL PHYSICS TO APPLIED PHYSICS 149APPENDIX 167BIBLIOGRAPHY 175INDEX 193