Hybrid Micromachining and Microfabrication Technologies

Audience Mechanical, production, manufacturing, and automation industry engineers as well as researchers and (post) graduate students in the same disciplines. Sandip Kunar, PhD, is an assistant professor in the Department of Mechanical Engineering, Aditya Engineering College, India. His research interests include non-conventional machining processes, micromachining processes, advanced manufacturing technology, and industrial engineering. He has published more than 50 research papers in various international journals and conferences as well as two patents. Golam Kibria, PhD, is an assistant professor in the Department of Mechanical Engineering at Aliah University, Kolkata, India. He has worked as Senior Research Fellow (SRF) in the Council of Scientific & Industrial Research (CSIR) and his research interests include non-conventional machining processes, micromachining, and advanced manufacturing and forming technology. Prasenjit Chatterjee, PhD, is a full professor of Mechanical Engineering and Dean (Research and Consultancy) at MCKV Institute of Engineering, West Bengal, India. He has more than 120 research papers in various international journals and peer-reviewed conferences. He has authored and edited over 22 books on intelligent decision-making, fuzzy computing, supply chain management, optimization techniques, risk management, and sustainability modeling. Dr. Chatterjee is one of the developers of a new multiple-criteria decision-making method called Measurement of Alternatives and Ranking according to Compromise Solution (MARCOS). Asma Perveen, PhD, is an assistant professor in the Mechanical & Aerospace Engineering Department at Nazarbayev University, Kazakhstan. She earned her PhD from the National University of Singapore and worked as a research scientist at the Singapore Institute of Manufacturing Technology for over two years. Her research interests are in EDM, hybrid machining processes, additive manufacturing, polymer extrusion, and non-conventional machining processes.

• Preface xvAcknowledgement xix1 Overview of Hybrid Micromachining and Microfabrication Techniques 1Sandip Kunar, Akhilesh Kumar Singh, Devarapalli Raviteja, Golam Kibria, Prasenjit Chatterjee, Asma Perveen and Norfazillah Talib1.1 Introduction 21.2 Classification of Hybrid Micromachining and Microfabrication Techniques 31.2.1 Compound Processes 41.2.2 Methods Aided by Various Energy Sources 61.2.3 Processing Using a Hybrid Tool 91.3 Challenges in Hybrid Micromachining 91.4 Conclusions 101.5 Future Research Opportunities 11References 112 A Review on Experimental Studies in Electrochemical Discharge Machining 17Pravin Pawar, Amaresh Kumar and Raj Ballav2.1 Introduction 172.2 Historical Background 182.3 Principle of Electrochemical Discharge Machining Process 202.4 Basic Mechanism of Electrochemical Discharge Machining Process 202.5 Application of ECDM Process 232.6 Literature Review on ECDM 232.6.1 Literature Review on Theoretical Modeling 232.6.2 Literature Review on Internal Behavioral Studies 272.6.3 Literature Review on Design of ECDM 302.6.4 Literature Review on Workpiece Materials Used in ECDM 332.6.5 Literature Review on Tooling Materials and Its Design in ECDM 362.6.6 Literature Review on Electrolyte Chemicals Used in ECDM 392.6.7 Literature Review on Optimization Techniques Used in ECDM 422.7 Conclusion 87Acknowledgments 87References 873 Laser-Assisted Micromilling 101Asma Perveen, Sandip Kunar, Golam Kibria and Prasenjit Chatterjee3.1 Introduction 1023.2 Laser-Assisted Micromilling 1033.2.1 Laser-Assisted Micromilling of Steel Alloys 1033.2.2 Laser-Assisted Micromilling of Titanium Alloys 1053.2.3 Laser-Assisted Micromilling of Ni Alloys 1083.2.4 Laser-Assisted Micromilling of Cementite Carbide 1093.2.5 Laser-Assisted Micromilling of Ceramics 1103.3 Conclusion 111References 1124 Ultrasonic-Assisted Electrochemical Micromachining 115Sandip Kunar, Itha Veeranjaneyulu, S. Rama Sree, Asma Perveen, Norfazillah Talib, Sreenivasa Reddy Medapati and K.V.S.R. Murthy4.1 Introduction 1164.2 Ultrasonic Effect 1174.2.1 Pumping Effect 1174.2.2 Cavitation Effect 1174.3 Experimental Procedure 1174.4 Results and Discussion 1184.4.1 Effect of Traditional Electrochemical Micromachining 1184.4.2 Effect of Electrolyte Jet During Micropatterning 1194.4.3 Effect of Ultrasonic Assistance During Micropatterning 1214.4.4 Effect of Ultrasonic Amplitude During Micropatterning 1214.4.5 Influence of Working Voltage During Micropatterning 1214.4.6 Influence of Pulse-Off Time During Micropatterning 1214.4.7 Influence of Electrode Feed Rate During Micropatterning 1224.5 Conclusions 122References 1235 Micro-Electrochemical Piercing on SS 204 125Manas Barman, Premangshu Mukhopadhyay and Goutam Kumar Bose5.1 Introduction 1255.2 Experimentation on SS 204 Plates With Cu Tool Electrodes 1265.3 Results and Discussions 1275.4 Conclusions 134References 1346 Laser-Assisted Electrochemical Discharge Micromachining 137Sandip Kunar, Kagithapu Rajendra, V. V. D. Praveen Kalepu, Prasenjit Chatterjee, Asma Perveen, Norfazillah Talib and K.V.S.R. Murthy6.1 Introduction 1386.2 Experimental Procedure 1406.3 Results and Discussion 1436.3.1 ECDM Pre-Process 1436.3.2 Laser Pre-Process 1456.4 Conclusions 147References 1477 Laser-Assisted Hybrid Micromachining Processes and Its Applications 151Ravindra Nath Yadav7.1 Introduction 1527.2 Laser-Assisted Hybrid Micromachining 1567.3 Laser-Assisted Traditional-HMMPs 1577.3.1 Laser-Assisted Microturning Process 1577.3.2 Laser-Assisted Microdrilling Process 1607.3.3 Laser-Assisted Micromilling Process 1617.3.4 Laser-Assisted Microgrinding Process 1627.4 Laser-Assisted Nontraditional HMMPs 1637.4.1 Laser-Assisted Electrodischarge Micromachining 1647.4.2 Laser-Assisted Electrochemical Micromachining 1667.4.3 Laser-Assisted Electrochemical Spark Micromachining 1677.4.4 Laser-Assisted Water Jet Micromachining 1687.5 Capabilities and Shortfalls of LA-HMMPs 1717.6 Conclusion 174Acknowledgment 174References 1748 Hybrid Laser-Assisted Jet Electrochemical Micromachining Process 179Sivakumar M., J. Jerald, Shriram S., Jayanth S. and N. S. Balaji8.1 Introduction 1808.2 Overview of Electrochemical Machining 1818.3 Importance of Electrochemical Micromachining 1828.4 Fundamentals of Electrochemical Micromachining 1828.4.1 Electrochemistry of Electrochemical Micromachining 1838.4.2 Mechanism of Material Removal 1848.5 Major Factors of EMM 1848.5.1 Nature of Power Supply 1848.5.2 Interelectrode Gap (IEG) 1858.5.3 Temperature, Concentration, and Electrolyte Flow 1858.6 Jet Electrochemical Micromachining 1868.7 Laser as Assisting Process 1888.8 Laser-Assisted Jet Electrochemical Micromachining (la-jecm) 1898.8.1 Working Principles of LAJECM 1898.8.2 Mechanism of Material Removal 1918.8.3 Materials 1938.8.4 Theoretical and Experimental Method for Process Energy Distribution 1948.8.5 LAJECM Process Temperature 1968.8.6 Material Removal Rate and Taper Angle 1968.8.7 LAJECM and JECM Comparison 1978.8.8 Machining Precision 1988.8.8.1 Geometry Precision 1988.8.8.2 Profile Surface Roughness 2008.9 Applications of LAJECM 200References 2029 Ultrasonic Vibration-Assisted Microwire Electrochemical Discharge Machining 205Sandip Kunar, Kagithapu Rajendra, Devarapalli Raviteja, Norfazillah Talib, S. Rama Sree and M.S. Reddy9.1 Introduction 2069.2 Experimental Setup 2079.3 Results and Discussion 2089.3.1 Influence of Ultrasonic Amplitude on Micro Slit Width 2099.3.2 Influence of Voltage on Micro Slit Width 2119.3.3 Effect of Duty Ratio on Micro Slit Width 2129.3.4 Influence of Frequency on Slit Width 2139.3.5 Analysis of Micro Slits 2149.4 Conclusions 215References 21610 Study of Soda-Lime Glass Machinability by Gunmetal Tool in Electrochemical Discharge Machining and Process Parameters Optimization Using Grey Relational Analysis 219Pravin Pawar, Amaresh Kumar and Raj Ballav10.1 Introduction 22010.2 Experimental Conditions 22110.3 Analysis of Average MRR of Workpiece (Soda-Lime Glass) Through Gunmetal Electrode 22310.3.1 ANOVA for Average MRR 22410.3.2 Influence of Input Factors on Average MRR 22810.4 Analysis of Average Depth of Machined Hole on Soda-Lime Glass Through Gunmetal Electrode 22810.4.1 ANOVA for Average Machined Depth 22910.4.2 Influence of Input Factors on Average Machined Depth 23010.5 Analysis of Average Diameter of Hole of Soda-Lime Glass Through Gunmetal Electrode 23110.5.1 ANOVA for Average Hole Diameter 23110.5.2 Influence of Input Factors on Average Hole Diameter 23110.6 Grey Relational Analysis Optimization of Soda-Lime Glass Results by Gunmetal Electrode 23210.6.1 Methodology of Grey Relational Analysis 23310.6.2 Data Pre-Processing 23310.6.3 Grey Relational Generating 23310.6.4 Deviation Sequence 23410.6.5 Grey Relational Coefficient 23510.6.6 Grey Relational Grade 23510.7 Conclusion 238Acknowledgments 238References 23811 Micro Turbine Generator Combined with Silicon Structure and Ceramic Magnetic Circuit 243Minami Kaneko and Fumio Uchikoba11.1 Introduction 24411.2 Concept 24611.3 Fabrication Technology 24711.3.1 Microfabrication Technology of Silicon Material 24711.3.2 Multilayer Ceramic Technology 24811.4 Designs and Experiments 24911.4.1 Designs of Turbine and Magnetic Circuit for Single-Phase Type 24911.4.2 Designs of Turbine and Magnetic Circuit for Three-Phase Type 25211.4.3 Rotational Experiment and Rotor Blade Design 25311.4.4 Low Boiling Point Fluid and Experiment 25511.5 Results and Discussion 25511.5.1 Fabricated Evaluation 25511.5.2 Rotational Result 25811.5.3 Comparison of Rotor Shape and Rotational Motion 26211.5.4 Phase Change 26411.6 Conclusions 267Acknowledgment 268References 26812 A Review on Hybrid Micromachining Process and Technologies 271Akhilesh Kumar Singh, Sandip Kunar, M. Zubairuddin, Pramod Kumar, Marxim Rahula Bharathi B., P.V. Elumalai, M. Murugan and Yarrapragada K.S.S. Rao12.1 Introduction 27212.2 Characteristics of Hybrid-Micromachining 27212.3 Bibliometric Survey of Micromachining to Hybrid-Micromachining 27312.4 Material Removal in Microsizes 27512.5 Nontraditional Hybrid-Micromachining Technologies 27612.6 Classification of Techniques Used for Micromachining to Hybrid-Micromachining 27612.6.1 Classification According to Material Removal Hybrid-Micromachining Phenomena 27712.6.2 Classification According to Categories Based on Material Removal Accuracy 27712.6.3 Classification According to Hybrid-Micromachining Purposes 27812.6.4 Classification of Hybrid Micromanufacturing Processes 27812.7 Materials Are Used and Application of Hybrid-Micromachining 27812.8 Conclusions 279References 27913 Material Removal in Spark-Assisted Chemical Engraving for Micromachining 283Sumanta Banerjee13.1 Introduction 28413.2 Essentials of SACE 28513.2.1 Instances of SACE Micromachining 28613.3 Genesis of SACE Acronym: A Brief Historical Survey 28613.4 SACE: A Viable Micromachining Technology 28813.4.1 Mechanical µ-Machining Techniques 28813.4.2 Chemical µ-Machining Methods 28913.4.3 Thermal µ-Machining Methods 28913.5 Material Removal Mechanism in SACE µ-Machining 29013.5.1 General Aspects 29013.5.2 Micromachining at Shallow Depths 29413.5.3 Micromachining at High Depths 30013.5.4 Micromachining by Chemical Reaction 30113.6 SACE µ-Machining Process Control 30313.6.1 Analysis of Process 30313.6.2 Etch Promotion 30413.7 Conclusion and Scope for Future Work 307References 308Index 313