Del 81
Techniques and Challenges for 300 mm Silicon: Processing, Characterization, Modelling and Equipment
H. Richter, P. Wagner, G. Ritter, Germany) Richter, H. (Institute for Semiconductor Physics, Franfurt (Oder), Germany) Wagner, P. (Wacker Siltronic AG, Burghausen, USA) Ritter, G. (SEMITOOL Inc, Kalispell
Inbunden
2 689 kr
