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The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.
- Format: Inbunden
- ISBN: 9780198562870
- Språk: Engelska
- Antal sidor: 356
- Utgivningsdatum: 1998-05-28
- Förlag: Oxford University Press