Del 7

Plasma Etching

Fundamentals and Applications

Inbunden, Engelska, 1998

Av M. Sugawara, Japan) Sugawara, M. (Professor, Professor, Hachinohe Institute of Technology, Minoru Sugawara

4 029 kr

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The focus of this book is the remarkable advances in understanding of low pressure RF (radio frequency) glow discharges. A basic analytical theory and plasma physics are explained. Plasma diagnostics are also covered before the practicalities of etcher use are explored.

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