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Based on a graduate course at UCLA, this book describes reliability and failure of thin films. Beginning with core topics such as deposition and diffusion, the book fully explains irreversible processes with practical examples. Closing with failure analysis, this book is ideal for graduate students, researchers and practitioners.
- Format: Inbunden
- ISBN: 9780521516136
- Språk: Engelska
- Antal sidor: 412
- Utgivningsdatum: 2010-11-25
- Förlag: Cambridge University Press