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Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.

  • Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology
  • Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components
  • Assesses the best techniques for repairing micro-defects

Produktinformation

  • Utgivningsdatum2020-10-21
  • Mått191 x 235 x undefined mm
  • Vikt910 g
  • FormatHäftad
  • SpråkEngelska
  • SerieMicro and Nano Technologies
  • Antal sidor448
  • FörlagElsevier Science
  • ISBN9780128178508

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