Surface Metrology for Micro- and Nanofabrication
Häftad, Engelska, 2020
Av Wei Gao, Japan) Gao, Wei (Chair, Precision Nanometrology Laboratory; Director, Research Center for Precision Nanosystems, Department of Fine Mechanics, Graduate School of Engineering, Tohoku University
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Fri frakt för medlemmar vid köp för minst 249 kr.Surface Metrology for Micro- and Nanofabrication presents state-of-the-art measurement technologies for surface metrology in fabrication of micro- and nanodevices or components. This includes the newest general-purpose scanning probe microscopes, and both contact and non-contact surface profilers. In addition, the book outlines characterization and calibration techniques, as well as in-situ, on-machine, and in-process measurements for micro- and nanofabrication.
- Provides materials scientists and engineers with an informed overview of the state-of-the-art in surface metrology
- Helps readers select and design the optimized surface metrology systems and carry out proper surface metrology practices in the fabrication of micro/nano-devices and components
- Assesses the best techniques for repairing micro-defects
Produktinformation
- Utgivningsdatum2020-10-21
- Mått191 x 235 x undefined mm
- Vikt910 g
- SpråkEngelska
- SerieMicro and Nano Technologies
- Antal sidor448
- FörlagElsevier Science
- EAN9780128178508