Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola.William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.

• Perspective and History. Fundamentals. Optical Properties of Materials and Layered Structures. Instrumentation. The Anatomy of a Reflectance Spectrum. Aspects of Single-Wavelength Ellipsometry. The Anatomy of an Ellipsometric Spectrum. Analytical Methods and Approach. Optical Data Analysis. Quality Assurance. Very Thin Films. Roughness. Appendices. Index.

Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola.William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.

• Perspective and History. Fundamentals. Optical Properties of Materials and Layered Structures. Instrumentation. The Anatomy of a Reflectance Spectrum. Aspects of Single-Wavelength Ellipsometry. The Anatomy of an Ellipsometric Spectrum. Analytical Methods and Approach. Optical Data Analysis. Quality Assurance. Very Thin Films. Roughness. Appendices. Index.

Harland Tompkins retired from full-time employment in 2001. During his full-time employment, he was employed by General Electric Co., Bell Laboratories, the Idaho National Engineering Lab, and Motorola.William A. McGahan is the author of Spectroscopic Ellipsometry and Reflectometry: A User's Guide, published by Wiley.

• Perspective and History. Fundamentals. Optical Properties of Materials and Layered Structures. Instrumentation. The Anatomy of a Reflectance Spectrum. Aspects of Single-Wavelength Ellipsometry. The Anatomy of an Ellipsometric Spectrum. Analytical Methods and Approach. Optical Data Analysis. Quality Assurance. Very Thin Films. Roughness. Appendices. Index.