Spectroscopic Ellipsometry and Reflectometry

A User's Guide

Inbunden, Engelska, 1999

Av Harland G. Tompkins, William A. McGahan, Inc.) Tompkins, Harland G. (Motorola, Inc.) McGahan, William A. (Nanometrics, Tompkins, McGahan, Harland G Tompkins, William A McGahan

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While single wave ellipsometry has been around for years, spectroscopic ellipsometry is fast becoming the method of choice for measuring the thickness and optical properties of thin films. This book provides the first practical introduction to spectroscopic ellipsometry and the related techniques of reflectometry. A guide for practitioners and researchers in a variety of disciplines, it addresses a broad range of applications in physics, chemistry, electrical engineering, and materials science.