Plasma Processing of Materials
Scientific Opportunities and Technological Challenges
Häftad, Engelska, 1991
Av National Research Council, Division on Engineering and Physical Sci, Division on Engineering and Physical Sciences, Commission on Physical Sciences Mathematics and Applications, Board On Physics And Astronomy, Plasma Science Committee, Panel on Plasma Processing of Materials
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Describes the relationship between plasma processes and industrial applications, examines plasma processing in the electronics industry, highlights the scientific foundation underlying this technology, and discusses education issues in this field. This title recommends a coordinated, focused, and well-funded research program in this area.
Produktinformation
- Utgivningsdatum1991-02-01
- Mått216 x 279 x undefined mm
- FormatHäftad
- SpråkEngelska
- Antal sidor88
- FörlagNational Academies Press
- ISBN9780309045971